XYZ Nanopositioning Stages

XY Stages     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages



PI's XYZ piezo nanopositioning stages are based on two design principles: seriel kinematics (stacked or nested) and parallel kinematics. Parallel kinematic approaches provide lower inertia with faster response and also allow for the implementation of parallel metrology position feedback leading to higher overall precision. Serial kinematics are easier to design and manufacture and hence somewhat less costly, parallel designs provide higher overall performmance.


P-313 PicoCube™ XYZ Piezo Scanner with Picometer Precision,
High Bandwidth, No Servo Lag, for Scanning Probe Microscopy


P-313 XYZ Piezo Nanopositioning Stage
  • 20 Picometers Resolution, <1 nm Hysteresis
  • Ultra-High-Performance Scanner for AFM/SPM
  • New Drive Concept for Very High Bandwidth w/o Servo Lag
  • Compact Manipulation Tool for Bio-/Nanotechnology
  • High Resonant Frequency 11 khz (Z) 4.0 kHz (X,Y)
  • 1 µm Travel Range

The P-313 PicoCube XYZ nanopositioning scanning stage is based on a novel crystalline, leadfree piezoelectric material which differs from classical PZT piezo material. The P-313 features a particularly high motion linearity enabling ultra-high precision positioning without feedback sensors and closed-loop control. It was designed for applications which combine high dynamics, small travel and ultra-high precision requirements.

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P-363 PicoCube™ XYZ Piezo Scanner for AFM, Scanning Probe Microscopy 5x5x5µm


  • Closed-Loop Scanner for Atomic Force Microscopy, SPM
  • Nano-Manipulator for Bio &Nanotechnology
  • 50 Picometer Resolution
  • Fast: High Resonant Frequency 9.8 kHz
  • Closed-Loop, Capacitive Parallel-Metrology Automatically Compensates Guiding Errors
  • 5µm XYZ Scanning / Positioning Range
  • Vacuum Option

The P-363 PicoCube™ is a compact and rugged XYZ nanopositioning stage providing ultra-high-performance in closed-loop operation. It is designed for scanning probe microscopy and nanomanipulation applications. Combining a stiff high-speed XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback it is capable of better than 50 picometers resolution.

The PicoCube can be operated by the E-712 digital controller or the E-536 PicoCube controller.

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P-363 PicoCube




P-733 XYZ Piezo-Nanopositioning Stage with Aperture for Microscopy, 100x100x10µm High Performance Stage, well Suited for STED

P-733 XYZ Nanopositioning Stage
  • 100x100x10µm Standard Scanning / Positioning Range
  • Direct Drive, High-Speed Versions for Particle Tracking
  • Capacitive Sensors provide Resolution to 0.1 Nanometers
  • Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Frictionless, EDM cut Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Vacuum and Non-Magnetic Versions

The P-733 XYZ piezo positioner is available in two versions:

A) High-speed, direct-drive scanner for fast scanning and tracking applications (e.g. single particle tracking): Its direct drive system features 30x30x10 µm closed-loop travel, 0.1 nanometer resolution and extremely fast response.

B) Long Travel (100x100x10 µm) for standard nanopositioning applications. Both feature parallel-metrology with capacitive feedback for highest multi-axis precision, stability and linearity.

XY versions are also available

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P-915K Vacuum Compatible XYZ Piezo Nanopositioning Stage, 100µm,200x200mm Aperture, High-Dynamics, High-Load Nanopositioner


  • 100µm XYZ Scanning / Positioning Ranges
  • 1 Nanometer Resolution
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Excellent Straightness: <0.1 µrad Runout
  • Frictionless, High-Precision Flexure Guiding System
  • Vacuum Compatible to 10-6 hPa

This high-dynamics piezo nanopositioning stage was designed for high loads and vacuum environments. Parallel-metrology with capacitive feedback guarantees highest multi-axis precision, stability and linearity. It is an example of PI's custom nanopositioning stage capabilities. Providing a travel range of 100x100x100 µm and 1 nanometer resolution, it can handle loads to 50 kg.
P-P15.K Vacuum Compatible Nanopositioning XYZ Stage

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P-611 NanoCube XYZ Piezo Nanopositioner, 120µm Compact & Cost Effective 3-Axis Piezo System

XYZ Piezo Nanopositioning Stage
  • Economical Piezo Mechanics & Controller
  • Strain Gauge Sensor Versions & Open Loop Versions
  • 120µm XYZ Scanning / Positioning Range
  • Small Footprint 44x44 mm
  • Frictionless, EDM Cut Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • XY, X & Z Systems also Available
  • Watch Video Animation on Youtube

The P-611 NanoCube® XYZ piezo stage is a compact and low cost multi-axis nanopositioning system. It is used in applications from microscopy to high-speed, automatic fiber alignment (coarse/fine systems available, watch video)

The minimal inertia and stiff piezo flexure system help to boost speed and throughput in device characterization applications.

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PInano XYZ Piezo Scanning Stage Family for SR Microscopy
Higher Stability with Capacitive Feedback

  • 200µm XY or XYZ Scanning / Positioning Range
  • Choice of Sensors: Capacitive (Higher Stability & Linearity) or PiezoResisive (Lower Cost)
  • Direct-Drive Version for Higher Dynamics
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • High Performance Controller Included

PInano™ XYZ and XY piezo stages are affordable high-precision nanopositioning systems optimized for scanning microscopy.
The new models are equipped with direct-measuring capacitive sensors. This type of sensor can provide higher linearity and long term stability than the lower cost piezoresistive sensor-equipped stages which are still available. Capacitive sensors are also less sensitive to noise due to a high-frequency measurement principle as opposed to the DC-based sensing technique used in piezoresistive sensors. The net effect is similar to the higher performance of FM radio compared to the more noisy AM radio.
PInano™ stages feature a low profile of 0.8 inches (20mm) for easy integration and a large aperture for Petri dishes and microscope slide holders.

3 Versions are available:
High stability, long travel (200x200x200µm) microscope stage equipped with direct-metrology capacitive feedback.

An economical, version equipped with lower cost piezoresistive sensors.

And a high speed, particle tracking microscope stage (70x70x50µm) with direct drive for fastest response

All versions are also available in XY configurations.

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P-545 PI nano Piezo Nanopositioning XYZ Stage

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PIHera® Compact XYZ Piezo Nanopositioning Stages , 50 to 1800 µm Cost Efficient & High-Accuracy

P-620.2 Piezo Nanopositioning XYZ Stage

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  • To 1800µm XY Scanning / Positioning Ranges, to 400µm in Z
  • High-Precision, Cost-Efficient
  • Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
  • Frictionless, High-Precision Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Vacuum Option

PIHera® piezo stages are available as X, XY and Z positioners. They can be combined to form compact XYZ nanopositioning systems. XY travel to 1800 microns (1.8mm) is available and Z-travel to 400µm. All are equipped with direct-metrology capacitive feedback for precision in the nanometer range and below.

PIHera single axis linear positioners are also available.





P-517, P-527 Multi-Axis Piezo Scanner to 200 x 200 x 10µm High-Dynamics &
66x66mm Aperture for Scanning Microscopes

  • To 200µm Scanning / Positioning Ranges
  • Sub-Nanometer Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • Capacitive Sensors for Highest Linearity
  • Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators

These piezo nanopositioning stages come in 6 different versions with linear travel ranges to 200 microns per axis and rotation to 4 mrad. The 66 x 66 mm clear aperture makes them well suited for microscopy / transmitted-light applications, optical tweezers etc. Z positioners and Tip/Tilt positioners are also available, custom versions with 6 axes have been built. P-517/P-527 stages have been used in many microscopy, optical trapping and nanotechnology applications. Papers and articles
P-517 Piezo Nanopositioning XYZ Stage

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PIMars™ XYZ Piezo Nanopositioning System, to 340 µm High-Precision Stage, 3 to 6 Axes, 66x66 mm Aperture

P-562 PIMars XYZ Nanopositioning Stage

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  • To 340µm XYZ Scanning / Positioning Ranges
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
  • Excellent Scanning Flatness with Flexure Guiding System
  • High-Dynamics Version Available; 6-Axis Version Available
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • UHV Versions to 10-9 hPa

PIMars™ flexure guided piezo stages are high-end nanopositioning and scanning systems providing very good flatness and straightness in the nanometer range along with sub-nanometer precision. The large aperture is ideal for transmitted-light applications such as optical trapping near-field microcopy, laser scanning / nanostructuring or super-resolution microscopy and mask positioning. It features parallel-metrology with capacitive feedback for highest multi-axis precision stability and linearity.

4 Travel Ranges are available:
100x100x100µm, 200x200x200µm, 300x300x300µm (closed-loop range, slightly more in open loop) and a direct drive version for particle tracking with 45x45x15 microns.

Laser Lithography Application for Bio-Nanotechnology / Medical Engineering





P-915K XY & Theta-Z Piezo Nanopositioning Stage , 250x250µm, 16mrad, 3 Degrees of Freedom in the XY Plane

  • 250x250µm, 16 mrad Scanning / Positioning Ranges
  • Frictionless, High-Precision Flexure Guiding System
  • High Stiffness >1 N/µm
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators


This compact multi-axis piezo nanopositioning stage provides 250x250µm of XY travel and 16 mrad of rotation around the Z-axis.

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P-915 XY Theta-Z nanopositioning stage




P-615 NanoCube® XYZ Piezo System, Long-Travel Multi-Axis Piezo Stage for Precision Alignment Applications


P-615 Piezo Nanopositioning XYZ Stage
  • Up to 420x420x300µm XYZ Scanning / Positioning Ranges
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • 10 mm Aperture, for Alignment and Photonics Packaging Applications
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Open- & Closed-Loop Options
  • Vacuum Versions to 10-9 hPa
  • Frictionless, High-Precision Flexure Guiding System
  • 1 nm Resolution

The P-615 NanoCube® XYZ piezo nanopositioning and alignment system features a large travel range to 420x420x300 microns. Equipped with a zero-stiction, zero-friction flexure guiding system and capacitive direct metrology, this NanoCube® provides motion with ultra-high resolution and settling times of only a few milliseconds.

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PIMars™ 6-Axis Piezo Nanopositioning System, 200µm, 1 mrad

  • 6 Degrees of Freedom
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
  • Excellent Scanning Flatness with Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • UHV Versions to 10-9 hPa

The 6-Axis PIMars piezo flexure stage is one of the most advanced nanopositioning systems in the world. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms (see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range..

Custom systems with larger travel ranges or faster response are available on request

P-562 PIMars 6-Axis Nanopositioning Stage

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P-587 6-Axis Piezo Nanopositioning Stage, to 800µm


Piezo Nanopositioning 6-Axis Stage

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  • For Surface Metrology, Scanning and Positioning in all Six Degrees of Freedom
  • 800x800x200 µm Linear, up to 10 mrad Rotational Range
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Sensors provide High Linearity and Resolution
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Frictionless, High-Precision Flexure Guiding System
  • Active Trajectory Control in All 6 Degrees of Freedom

The P-587.6CD is a unique, highly accurate, 6-axis scanning and positioning system based on piezo flexure drives. It provides a linear travel range of 800 x 800 x 200 µm and rotation ranges up to 10 mrad.




N-515K Non-Magnetic High-Load Piezo Hexapod, 6-Axis Precision Positioning System with PiezoWalk Linear Drives


  • 6 Degrees of Freedom
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
  • Excellent Scanning Flatness with Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • UHV Versions to 10-9 hPa

This non-magnetic 6-axis positioner combines the advantages of the parallel-kinematic hexapod approach with the precision and stiffness of the NEXLINE® piezowalk linear motors. It can handle large loads and automatically locks the position when powered off. The piezo drives do not exhibit magnetic fields and at the same time are not affected by magnetic or electric fields. N-515.K 6-Axis Nanopositioning Stage

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XY Stages     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages