Fast microscope focus stages and nanopositioning systems

Fast Microscope Objective Focusing Stages

Paper: Fast Laser Autofocus Systems     Super Resolution Microscope Stages     Motion Control for Genome Sequencing

Why Fast Focusing Stages?


Fast focusing stages are used in microscopy, life sciences, semiconductor inspection, laser processing, genome sequencing, and automated optical systems. They enable rapid Z-positioning of microscope objectives, samples, or optics with nanometer precision, improving autofocus speed, image quality, throughput, and repeatability in applications such as genome sequencing, 3D imaging, wafer inspection, and metrology.

High-precision objective nanofocusing stages are designed for fast motion and nanometer to sub-nanometer resolution. Piezo flexure systems typically cover travel ranges from 100 µm to 2 mm, while voice-coil drives provide several millimeters of fast Z motion. The ultra-stiff actuation of piezo systems enables fast scanning rates and step-and-settle times in the low millisecond range.

Voice-coil-driven objective nano-focusing stages are used for longer travel ranges of up to 7 mm in microscopy, biotech, wafer inspection, genome sequencing, and automated optical-axis adjustment. Air-bearing stages with active counterbalance provide even longer travel.
Voice-Coil Focusing Stages

V-308 Fast Nanopositioning / Objective Focusing Stage with Voice-Coil Linear Motor, 7 mm Travel

V-308 Nanopositioning Stage for Fast Focus, Voice Coil Motor
  • 10 nanometer incremental motion, 1 nm sensor resolution
  • 7 mm motion range, user-adjustable
  • High-performance voice-coil linear motor and optical linear encoder
  • Integrated adjustable counterbalance up to 2.2 lbs
  • High-precision crossed roller bearings
  • Accessories for microscopy, biotech, and wafer inspection applications
V-308 PIFOC® fast objective focusing nanopositioning stages are designed for nanometer-precise, high-speed focusing over several millimeters. Typical applications include biotech, genome sequencing, microscopy, wafer inspection, and automated optical-axis adjustment.
Specs, Details, Request Quote
Nano-Focusing and Z-Scanning Mechanisms Advance Life Sciences, Biotech, Laser Processing and Semiconductors

Video: Fast Voice-Coil Nanopositioning Focus Motor with 7,000 µm Travel, Nanometer Resolution, and Built-In Counterbalance

Piezo-Driven Fast Focusing Stages

N-725 Nano Focus Positioner, 2 mm Travel, PiezoWalk Motor

N-725 Nanopositioning Stage with PiezoWalk Drive
  • Closed-loop PiezoWalk motor combines long travel, fast response, and high stiffness
  • High force and high dynamics for positioning and scanning large microscope objectives
  • 2 mm travel for large penetration depths such as two-photon microscopy
  • Very fast response with 20 ms step-and-settle time
  • Self-locking at rest, with no heat generation and no servo jitter
  • Drive resolution < 1 nm, 20 nm encoder resolution
N-725 PIFOC® combines smooth motion, long travel, fast response, and high position stability in a compact piezo objective drive.
PDF Brochure | Specs, Details, Request Info

PIFOC® 100–800 µm Piezo Objective Nanopositioning Stages with Controller and Software

PIFOC High Performance System
  • Significantly faster response and higher lifetime than motorized Z stages
  • Closed-loop operation with sub-nanometer resolution
  • High-performance digital servo controller included
  • USB, RS-232, and analog interfaces
  • 100 µm, 400 µm, and 800 µm positioning ranges
  • Frictionless, zero-backlash flexure guides for better focus stability
  • Capacitive direct metrology for high linearity and stability
The PIFOC® piezo objective scanner systems combine a high-precision piezo mechanism with a custom-tuned digital controller. Stiff flexure guiding and advanced servo control provide high stiffness, fast response, and minimal settling times.
High-End Version: Specs, Drawings, Request Information
Economical Package with Controller: Specs, Drawings, Request Information
How Objective Nanofocusing Stages Work

Video: Fast Piezo Focus with 800 µm Travel and Nanometer Precision

Specs of the latest piezo focus technology

P-726 PIFOC® High-Stiffness, High-Speed Piezo Objective Nanopositioner for Heavy, High-NA Objectives

P-726 PIFOC Objective Scanner
  • Extremely stiff design for high dynamics with large high-NA objectives
  • 1120 Hz resonant frequency, 560 Hz with 210 g load
  • Typical settling time about 6 ms
  • 100 µm positioning range
  • Closed-loop capacitive direct metrology
  • Resolution to 0.3 nm
  • Frictionless, zero-backlash flexure guides
The P-726 PIFOC® nanofocusing system is designed for very fast stepping with heavy, high-numerical-aperture objectives used in high-resolution microscopy.
PDF Brochure | Specs, Drawings, Request Information

P-725.xDD PIFOC® Ultra-High-Dynamics Piezo Microscope Objective Nanopositioner and Scanner: 18 µm

Ultra-High-Dynamics Piezo Microscope Objective Nanopositioner and Scanner
  • Settling time under 5 ms with microscope objective installed
  • 18 µm positioning range
  • Sub-nanometer resolution
  • Parallel flexure guiding for minimized objective offset
  • Capacitive or strain-gauge feedback options
  • Compatible with MetaMorph™ imaging software
P-725.xDD objective positioners are designed for extremely fast motion over short travel ranges. Their ultra-stiff direct piezo drive enables high scanning rates and response times of only a few milliseconds.
PDF Brochure | Specs, Drawings, Request Information
Custom Fast Focusing Stages

Compact PIFOC® Microscope Objective Nanopositioner and Scanner for Small Objectives

Piezo Nanopositioning Linear Actuators
  • Positions and scans microscope lenses with sub-nanometer resolution
  • Frictionless, zero-backlash flexure guides for focus stability
  • 100 µm open-loop positioning range
  • Long-life PICMA® ceramic-encapsulated piezo actuators

Concept: Nosepiece Nanopositioner for Microscope Turrets

Nosepiece Nanopositioner for Microscope Turrets
  • Precisely positions and scans microscope turrets
  • Compact design with sub-nanometer resolution
  • Direct-metrology capacitive sensors for high linearity and stability
  • Frictionless, high-precision flexure guiding system
  • Long-life PICMA® ceramic-encapsulated piezo actuators
This nanopositioning system enables precise Z positioning and scanning directly at the microscope turret, helping maintain focus stability in high-resolution imaging applications.

Custom High-Force Nosepiece Nanopositioner: High-Load Capacity, Capacitive Feedback

Piezo Nanopositioning Linear Stage Nosepiece Nanopositioner for Microscopy
  • Scans and positions objectives with sub-nanometer resolution
  • Positioning range to 150 µm with millisecond settling time
  • Parallel flexure guiding for minimized objective offset
  • Capacitive direct metrology for higher linearity, stability, and dynamics
  • Long-life PICMA® ceramic-encapsulated piezo actuators
This high-load Power-PIFOC® version provides fast, stable objective positioning for microscope nosepieces and heavier optical configurations.

Custom Low-Profile Piezo Microscope Objective Nanopositioner and Scanner, 75 µm Range

High-Speed, Low-Profile Piezo Microscope Objective Nanopositioner
  • For W0.8 x 1/36" microscope objectives
  • Frictionless, zero-backlash flexure guiding for focus stability and minimized runout
  • Very low profile: 15 mm
  • Long-life PICMA® ceramic-encapsulated piezo actuators
Theis low profile nanopositioning stage provides objective motion for microscope configurations where installation height is limited.
Paper: Fast Laser Autofocus Systems     Super Resolution Microscope Stages     Learn more on Precision Motion Systems for Genome Sequencing
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