Nanopositioning Controllers: Multiaxis Digital & Analog

Digital servos provide advantages over analog circuits when high positioning linearity is important or when control parameters need to be modified frequently. This could be the case when load changes occur or when different motion profiles need to be optimized for minimum settling time or optimum tracking accuracy.

Analog servos are usually less expensive than digital servos. If designed well, they provide very low noise and fast response at a very attractive price.

All PI piezo nanopositioning controllers come with tunable notch filters and provide the highest closed-loop bandwidth in the industry.


Detailed Controller Selection Criteria (PDF)     For Single-Axis Controllers Click Here



Multi-Axis Digital Controllers (Digital Servo)



E-725 3-Axis High-Performance Digital Piezo Nanopositoning Controller

E-725 3-Axis High perfpormance Digital Controller
The E-725 is a high-performance digital nanopositioning controller for piezo stages with up to 3 axes. High-power amplifiers permit dynamic operation and scans even for piezo systems with high capacitance direct drives and large travel ranges. A powerful 32 bit processor ensures a servo rate of 20 kHz. Low Noise 24 bit DACs provide high position resolution. Digital I/O lines are available for triggering and synchronization with external events. Analog control inputs are optional. The ID chip feature enables automatic calibration and exchangeability between piezo mechanics and controllers.
  • Cost Optimized for 3-Axis Applications
  • Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
  • All Parameters Configurable in Software, Change of Settings "on-the-fly"
  • For Nanopositioning Systems with Capacitive Feedback
  • Three Digital Communication Interfaces: Ethernet,
    USB, RS-232
  • Optional High-Speed Parallel I/O Interface
  • Digital I/O Lines for Trigger Functions
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • 4th Order Polynomial Linearization for Mechanics & Electronics
  • Dynamic Digital Linearization (DDL) Option Significantly Improves Dynamic Accuracy
  • ID-Chip Capability for Interchangeability of Controller & Piezo Mechanics
  • Flexible Wave Generators
  • Extensive Software Support



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Modular Digital Piezo Nanopositioning Controllers



E-712 Ultra-High Performance Digital Piezo Nanopositioning Controller: Modular System for up to 6 Axes


  • Extensive Software Support
  • Digital Controller of the Newest Generation: 50 kHz Servo Update Rate, Ultra-High Stability 20-bit D/A Converter
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • ID-Chip Capability for Interchangeability of Controller & Piezo Mechanics
  • Versatile Digital Interfaces: Ethernet, USB, RS-232
  • Optional High-Bandwidth Analog Control Inputs and Outputs

The E-712 high-end digital piezo nanopositioning controller was designed to meet the most demanding accuracy and dynamic-performance requirements of multi-axis precision positioning systems. The high-performance, real-time operating system makes possible coordinated servo-control of multiple axes (serial and parallel-kinematic configurations) and ensures excellent trajectory control
P-712 High Performance Controller
even during complex motion. The interface provides multiple ways to communicate with the E-712: from Ethernet and USB to parallel realtime control. In addition optional high-resolution analog I/O supports external analog sensor or control signals as well as driving external amplifiers.
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E-712 Chassis and Basic Modules



E-712 Real-Time Analog Interface Module


E-712 Real-Time Analog Interface Module
  • Powerful FPGA
  • Smallest Possible Latency
  • Command & Read Position in Real Time
  • Integrated Self-Testing 4 Analog Inputs
  • 4 Analog Outputs
  • 20-bit DACs
  • 18-bit ADCs

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E-712 Real-Time Digital Parallel-I/O Interface Modules


E-712 Real-Time Digital Parallel-I/O Interface Modules
  • Fast Communication with 500 ns Read and 1200 ns Write
  • Optional Real-Time Operating System
  • 32-bit Resolution
  • Configured for up to 6 Axis

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E-712 Feedback Sensor Modules for Capacitive and Incremental Sensors


E-712 Feedback Sensor Modules
  • For Capacitive Dual-Plate Sensors, Single Plate Sensors or Incremental Sensors
  • Configured for up to 6 Axis
  • Flexible Choice of Sensor Analysis

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E-712 High-Power & Low-Noise Piezo Amplifier Modules


E-712 High-Power & Low-Noise Piezo Amplifier Modules
  • Highest Stability, Low Noise
  • Choice of Low-Voltage, Middle Voltage (PicoCube™ Systems) and PiezoWalk NEXLINE® Linear Motor
  • 4 Channels

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Analog Multi-Axis Nanopositioning Controllers



E-664 XYZ Piezo Nanopositioning Controller for P-611.3S NanoCube® Systems

E-664 XYZ Piezo Nanopositioning Controller
  • Position Servo-Control with Notch Filter for Higher Bandwidth and Stability
  • High Bandwidth Analog Control Interface (0-10V) and Manual Control
  • 3 Integrated Amplifiers, 14 W Peak Power
  • 3 Displays for Position & Voltage

    The E-664 is a 3-axis nanopositioning controller and driver specifically designed for the P-611.3S NanoCube® XYZ nanopositioning system. Three integrated low-noise amplifiers and control circuitry for strain gauge position sensors allow closed-loop position resolution down to 2 nm and dynamic operation.



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E-545 3 Channel Piezo Nanopositioning Controller for PInano™ Piezo Microscope Stages

  • TCP/IP, USB und RS-232 Interfaces
  • Low-noise 24-bit D/A Converters
  • 3 Channels
  • Linearization for Piezoresistive Sensors
  • Notch Filter for Higher Bandwidth
  • 3 x 14 W Peak Power
  • Wave Generator with Programmable Trigger-I/O

The E-545 nanopositioning controller was designed for the PInano™ XY and XYZ piezo stage series for super-resolution microscopy. It comes with a multitude of digital and analog interfaces and ample software support.

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E-545 3 Channel Piezo Nanopositioning Controller




E-536 3-Axis Piezo Nanopositioning Controller for P-363 PicoCube™ Systems:
High Dynamics & Picometer Resolution


E-536 3-Axis Piezo Nanopositioning Controller
  • Ultra-Low Noise for Picometer Positioning
  • 3 x 100 W Peak Power
  • ±250 V Output Voltage
  • Optional Computer Interface & Display Module

The E-536 picopositioning controller is equipped with three ultra-low-noise amplifiers for piezo shear actuators. The controller design meets the special requirements of the high-speed, ultra-high-performance PicoCube™ XY(Z) piezo stages for dynamic and static applications.


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E-616 Nanopositioning Controller for Piezo Steering Mirrors and Tip/Tilt Platforms: Bench Top and OEM Card

  • Compact and Cost-Effective Design
  • 3 x 10 W Peak Power from 3 Integrated Amplifiers
  • Internal Coordinate Transformation Simplifies Control of Triopod Parallel Kinematics Designs
  • Closed-Loop

The E-616 nanopositioning controller is a compact unit designed for piezo based tip/tilt platforms and steering mirrors. It can drive tripod tip/tilt +Z designs as well as quad differential tip/tilt stages. Integrated coordinate transformation makes the operation transparent to the user. The unit is equipped with instrumentation amplifiers for high-resolution strain gauge position sensors for millisecond response and µrad / nanometer resolution. 10 Watts of output power per channel allow for dynamic operation of the tip/tilt systems for applications such as imaging, tracking and (laser) beam steering or stabilization.

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E-616 Nanopositioning Controller




Modular Analog Nanopositioning Controllers



E-500 & E-501 Modular Piezo Nanopositioning Controller


E-500 Modular Analog Nanopositioning Controller
  • 1, 2 & 3 Axes Standard , Custom Systems up to 12 Axes
  • 19" Rack and 9.5" Version
  • Choice of Amplifier Modules, 14 to 400 W Peak Power, 130V to 1000V
  • Choice of Position Servo Control Modules for Strain & Capacitive Sensors
  • Choice of PC Interface / Display Modules

The E-500 / E-501 rack is a very flexible modular piezo controller system that can be configured in many different of ways. A multitude of amplifier modules, interface modules sensor modules and servo controller modules allow the systems to be adapted to a wide range of applications. Up to 12 Channels fit in one rack.

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Modules for E-500/E-501 Rack



E-509 Analog Servo Controller Module / Sensor Signal Conditioner


E-509 Analog Servo Controller Module
  • Position Servo-Controller for Piezo Nanopositioning Systems
  • Choice of Position Sensor: Strain Gauge (lower cost) or Capacitive (higher precision)
  • 1-, 2- and 3-Channel Versions
  • Eliminates Drift and Hysteresis, Increases Piezo Stiffness
  • Notch Filter for Higher Bandwidth
  • ILS Circuitry Maximizes Capacitive Sensor Linearity

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E-517 Digital Interface Module, Wave Generator, Data Recorder, Display


E-517 Digital Display
  • Multiple Digital Interfaces: TCP/IP, USB, and RS-232 Interfaces
  • Intensive Software Support
  • Integrated Wave Generator & Data Recorder
  • Low-Noise 24-bit DACs, 25 kHz Sample Rate
  • 6-Digit Display for Voltage and Position
  • 1- & 3-Channel Versions
  • Wave Generator with Programmable Trigger-I/O

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E-505 High-Power Single Channel Piezo Amplifier Module


E-712 Feedback Sensor Modules
  • Low Noise, High Linearity
  • 200 W Peak Power
  • -20 to +120 V Output Voltage Range

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E-503 3-Channel Piezo
Amplifier Module


E-503 3-Channel Piezo Amplifier Module
  • Low Noise, High Linearity
  • 3 x 14 W Peak Power
  • -20 to +120 V Output Voltage

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E-504 High-Power, Energy Recovery Piezo Amplifier Module


E-504 High-Power, Energy Recovery Piezo Amplifier Module
  • Very Energy Efficient Through Energy Recovery
  • 280 W Peak Power
  • 100 W Average Output Power
  • -30 to +130 V Output Voltage Range

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E-506 Piezo Amplifier with Charge Control for High Dynamics & Linearity


E-506 Piezo Amplifier
  • Linearized Amplifier with Charge Control Compensates for Hysteresis
  • 280 W Peak Power
  • -30 to +130 V Output Voltage

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For Single-Axis Controllers Click Here