Linear Nanopositioning Stage Overview

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Mini Nanopositioning Stage, Direct Metrology, 10µm Travel, 0.1nm Resolution

P-772 Piezo Nanopositioning Linear Stage
  • Smallest Piezo Stage with Capacitive Feedback
  • Resolution < 0.1 nanometer, 10 µm Travel
  • Ideal for Head/Media Test & Fiber Optics
  • Fast Response (1.7 kHz Resonant Frequency)
  • ID-Chip for Auto Calibrate Function
  • Long Life with PICMA® High-Performance Piezo Drives & Frictionless Precision Flexure Guiding System

The P-772 piezo stage is the smallest flexure-guided, nanopositioning systems with capacitive sensor. It provides a positioning / scanning range of 10 microns, sub-nanometer resolution and ultra-fast response.

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P-712 Low-Profile Miniature Piezo Nanopositioning Scanner with Aperture


  • Ideal for Imaging and Scanning
  • High Dynamics, to 5 ms Settling Time
  • Positioning Range up to 40 microns
  • Resolution to 0.2 nanometer
  • Compact Design 40x40x6 mm with 25x15mm clear Aperture
  • Long Life PICMA® Piezo Actuators
  • More low-cost precision scanners

P-712 piezo stages are ideal for imaging and scanning applications. The high resonant frequency allows for fast motion and provides settling times of about 5 milliseconds. Open and closed-loop versions are avialable.

PDF Brochure | Request Quote 		P-772 Piezo Nanopositioning Linear Stage P-712 linear nanopositioning stage with aperture, 40 microns




P-753 LISA Linear Piezo Stage & Piezo Actuator, to 38µm, High-Dynamics, High Stability


Piezo Nanopositioning Linear Scanner
  • Resolution 0.05 Nanometers, Rapid Response
  • Versatile Design: Both Flexure Stage and Guided Actuator
  • Direct Metrology Capacitance Feedback for Highest Linearity & Long term Stability
  • Frictionless Precision Flexure System, for Ultra-Straight Motion
  • Long Life PICMA® Piezo Actuators
  • Vacuum and Nonmagnetic Versions Available

P-753 LISA Linear Stage Actuators are high-speed piezo nanopositioners to work as both stage and guided actuator. Capacitive feedback provides the highest precision and stability.

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P-752 High Precision Linear Nanopositioning Flexure Stage, to 35µm


  • 0.1 nanometer Resolution, Millisecond Response
  • Travel to 35 microns
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Ultra-Straight Motion with Flexure Guidance
  • Long Life PICMA® Piezo Actuators

P-752 piezo flexure linear nanopositioning systems provide rapid response with fast settling and extreme straightness and flatness and extremely low tip/tilt errors. They can be used horizontally and as Z-positioners. These stages perform especially well in Scanning Probe Microscopy and for high-speed dithering and disk drive testing applications. 		Piezo Nanopositioning Linear Stage

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P-750 High-Load Piezo-Nanopositioning Stage, Direct Metrology, 10kg Load, 75µm


High Load Piezo Nanopositioning Linear Stage
  • 10 kg Load Capacity
  • 1 nanometer Lateral Guiding Precision
  • Resolution < 1 nanometer
  • Long Life PICMA® Piezo Actuators
  • Fast Response
  • 75 microns Positioning Range
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Frictionless Precision Flexure Guiding System


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PiezoMove™ Low-Cost Flexure Actuator Family, for OEMs
  • 3 Designs, Many different Models
  • Positioning Ranges to 1 mm (1,000 microns)
  • Nanometer Resolution, Closed-Loop Available
  • Frictionless, High-Precision Flexure Guiding System
  • High Dynamics and Stiffness
  • Long Life PICMA® Piezo Actuators
  • Custom Designs: Non-Magnetic / Larger Travel or Faster Response
  • For Adaptronics, Optics, Medical, Biotech and Microfluidics Applications

These flexure piezo system actuators are lever-amplified and provide large positioning ranges to 1000 microns, fast response and high positioning accuracy in a small package. 		Piezo Nanopositioning Linear Actuators

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P-611.1 Cost-Effective Piezo Linear Nanopositioning Stage

Piezo Nanopositioning Linear Stage

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  • Cost Effective Design with Strain Sensors
  • Small Footprint 44x44 mm
  • Positioning Range to 120 microns
  • Resolution to 0.2 Nanometers
  • Cost-Effective Contrllers available
  • Long Life PICMA® Piezo Actuators
  • Also: XY, XZ, XYZ & Z Stages

P-611.1 piezo flexure linear nanopositioning stages are cost effective positioners with strain gauge feedback. 1 to 3 axis configurations are available. The systems provide up to 120 microns travel with sub-nanometer resolution.




PIHera® Piezo Linear Nanopositioning Stage Family: 50µm to 1800µm


  • Positioning Ranges 50 to 1800 microns
  • High-Precision, yet Cost-Efficient
  • To 0.1 Nanometer Resolution
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • X-, XY-, Z-, XYZ Versions
  • Vacuum Versions Available

PIHera® piezo linear nanopositioning systems feature Positioning Ranges from 50 microns to 1800 microns. Despite the long Positioning Ranges, the units are compact and provide rapid response and high guiding precision. 		Piezo Nanopositioning Linear Stage

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N-661 Miniature Linear Nanopositioning Stage with PiezoWalk Motor: 20mm Travel


Piezo Nanopositioning Linear Stage
  • 20 mm Travel
  • PiezoWalk Precision Linear Motor: Self-Locking at Rest, no Heat Generation, no Servo Dither
  • Compact: Only 70x50x20mm
  • High Resolution Linear Encoder
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for up to 30 picometers Resolution
  • Force Generation to 10N (2 lbs)

This piezowalk, linear-motor-driven nanopositioning stage combines long travel and high resolution.

A version with 0.5 nanometer encoder resolution is available as the N-664

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N-664 High-Resolution Translation Stage


  • Travel range
  • 30 mm Encoder
  • resolution 0.5 nm
  • Minimal incremental motion 2 nm
  • Excellent guiding accuracy
  • Max. velocity 10 mm/s

This piezowalk, linear-motor-driven nanopositioning stage combines long travel and high resolution.

PDF Brochure | Request Quote 		Piezo Nanopositioning Linear Stage




Hybrid Long-Travel Nano-Precision Linear Stages: 7 & 100 mm, 2 Nanometer Resolution


Hybrid Piezo Nanopositioning Linear Stage

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  • Hybrid Piezo + Servo Drives for Exceptional Responsiveness and Smoothness
  • 100mm Linear Stage, 50 mm/sec Max. Velocity.
  • 7 mm High Holding Force Stage for Vertical Travel
  • Reliable Execution of Nanometer Size Increments
  • Millisecond Settling Time to Nanometer Precision
  • Ultra-High Precision Linear Encoder, 2 Nanometers Resolution
  • Frictionless Piezo Drive and Flexure-Decoupled Ballscrew
  • Active Compensation of Backlash and Stick/Slip Effects
  • Excellent Velocity Control

The PI Hybrid Linear Nanopositioning Stage family consist of two unique nanopositioning systems that overcome the limitations of conventional precision positioning systems by combining the well-known advantages of piezo-flexure-drives (unlimited resolution and very rapid response) with the long Positioning Ranges and high holding forces of a servo-motor/ballscrew arrangement.
A 100 mm linear stage with 50mm/sec speed is available and a high-holding force stage for vertical travel featuring 7 mm travel. Both come with 2 nm resolution linear encoders and are operated by a special hybrid controller (model C-702).




PIFOC® Fast Objective Focusing Piezo Nanopositioning System


  • Compact, Light-Weight, Long Positioning Ranges to 1000 µm
  • Ideal for Fast Autofocus Applications
  • Clear Aperture up to 29 mm Ř
  • Choice of Position Feedback Sensors: Piezoresistive (lower cost); Capacitive (higher precision)
  • Sub-Nanometer Resolution


PDF Brochure | Request Quote 		Piezo Nanofocusing Nanopositioning Device




S-303 Nanopositioning High-Dynamics High-Resolution Piezo Phase Shifters


Piezo Nanopositioning Z Phase Shifter Stage

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  • 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • < 0.1 Nanometer Resolution; 3 Microns Positioning Range
  • Direct Metrology Option: Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Exceptional Thermal Stability
  • Aperture with Open-Loop Versions
  • Compact Size: 30 mm Diameter x 10 mm

S-303 phase shifters are very fast piezo systems based on tripod drive. They provide 3 µm positiong range with angstrom size step resolution, and sub-msec response dynamics. The S-303 can be mounted in any orientation. Open- and closed-loop versions are available.




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