Long Travel Piezo Nanopositioning Stages

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N-664 Nanopositioning Stage with PiezoWalk Motor: 30mm Travel


Piezo Nanopositioning Linear Stage with PiezoWalk Moter
  • Long Travel: 30 mm
  • PiezoWalk Precision Linear Motor: Self-Locking at Rest, no Heat Generation, no Servo Dither
  • Low Profile Only 20mm
  • 0.5 Nanometer Resolution High Precision Linear Encoder
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for up to 30 picometers Resolution
  • Force Generation to 10N (2 lbs)


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Long-Travel Hybrid Piezo/Servo Nanopositioning Stages: 100 mm, 2 Nanometer Resolution


  • 100mm Linear Travel, 50 mm/sec Max. Velocity.
  • Hybrid Piezo + Servo Drives Combining the best of Two Worlds
  • Exceptional Responsiveness and Smoothness
  • Reliable Execution of Nanometer Size Increments
  • Millisecond Settling Time to Nanometer Precision
  • Ultra-High Precision Linear Encoder, 2 Nanometers Resolution
  • Frictionless Piezo Drive and Flexure-Decoupled Ballscrew
  • Active Compensation of Backlash and Stick/Slip Effects
  • Excellent Velocity Control
  • 7 mm Vertical Stage also Available

The PI Hybrid Nanopositioning Stages combine the long Positioning Ranges and high holding forces of a servo-motor/ballscrew stages with the high resolution of piezo drives.
Two stages are available: A 100 mm linear stage with 50mm/sec speed and a special Z-stage with high-very high holding force for vertical applications featuring 7 mm travel. Both come with 2 nm resolution linear encoders and are operated by a special hybrid controller (model C-702).
Hybrid Piezo Nanopositioning Linear Stage

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PIHera® Compact Long Travel Piezo Flexure Stages: to 1800µm


Piezo Nanopositioning Stage Long Travel Flexure

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  • Positioning Range to 1.8 mm
  • High-Precision, yet Cost-Efficient
  • To 0.1 Nanometer Resolution
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • X-, XY-, Z-, XYZ Versions
  • Vacuum Versions Available

PIHera® long travel piezo stages feature Positioning Ranges to 1800 microns. Despite the long Positioning Ranges, the units are compact and provide rapid response and high guiding precision.




P-602 Long-Travel Piezo Flexure Actuator: To 1000 µm Travel

  • Compact & Cost Efficient
  • Up to 1000 µm Travel Range
  • High Stiffness

P-602 PiezoMove flexure-guided piezo nanopositioning actuators are based on a frictionless high-efficiency flexure motion amplifier and provide large travel ranges up to 1 millimeter with high stiffness and very fast response.

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P-602 Linear Actuator , Long travel Flexure Stage




Long Travel Piezo Piezo-Hexapod: 10mm / 6°

N-515 Non-Magnetic Hexapod
  • 6-Axis Piezo Positioner
  • PiezoWalk Motors
  • Travel Ranges 10 mm Linear, 6° Rotation
  • 202 mm (8") Clear Aperture
  • Non-Magnetic
  • Nanometer Resolution
  • Low-Profile: 140 mm Height Only
  • Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy
  • Up to 500 N Force Generation
  • Self Locking at Rest, No Heat Generation

This non-magnetic 6-axis positioner combines the advantages of the parallel-kinematic hexapod approach with the precision and stiffness of the NEXLINE® piezowalk linear motors. It can handle large loads and automatically locks the position when powered off. The piezo drives do not exhibit magnetic fields and at the same time are not affected by magnetic or electric fields.
More on Special Hexapods

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P-587 6-Axis Long-Travel Piezo Flexure Nanopositioning Stage, to 800µm/10mrad


P-587 Long Travel 6-Axis Stage
  • 800 x 800 x 200 µm Linear Range, up to 10mrad Rotation
  • For Surface Metrology, Scanning and Positioning in all Six Degrees of Freedom
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Direct Metrology with Capacitive Sensors for Highest Stability & Linearity
  • Longlife Lifetime PICMA® Piezo Multilayer Actuators Frictionless, High- Enhanced Responsiveness & Multi-Axis Precision: Parallel Kinematics / Metrology
  • Active Trajectory Control in All 6 Degrees of Freedom


The P-587.6CD is a unique, highly accurate, 6-axis scanning and positioning system based on piezo flexure drives. It provides a linear travel range of 800 x 800 x 200 µm and rotation ranges up to 10 mrad.

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