Nanopositioning Stages & Systems by PI

Piezo Stages
Nanopositioning equipment and instrumentation plays an important role in applictions such as microscopy, semiconductor test & manufacturing, optical alignment, bio-nanotechnology, optical scanning and high-speed / high-stability precision positioning.

PI nanpositioning systmes are largely based on the piezo effect and provide a combination of speed, resolution and guiding precision that is not possible with conventional motorized positioning technology.

The piezo effect enables extremely uniform, controlled small displacements. PI piezo nanopositioning stages are flexure-guided, free of maintenance and lubricants and available in vacuum and ultra-high vacuumm configurations. In addition to state-of-the-art piezo mechanisms we also design advanced digital servo piezo motion controllers and a number of position sensors providing sub-nanometer position resolution. The combination of mechanics, sensor technology and control electronics along with a wealth of software drivers and virtual instruments makes our nanopositioning systems unique.

PI employs over 750 staff world wide and has 4 decades of experience with design and manufacture of precision motion control equipment. Our customers demand the highest quality and accuracy as well as the best support.

No matter if you work at the leading edge of scientific research and better, more reliable instruments let you publish higher quality results faster, or if higher throughput and lower failure rates make your production line more profitable: PI will give you an advantage over your competition.

Our instruments are employed in automation equipment, in labs, on mountain tops and in space. Actually our piezo actuators and positioning stages are currently working in the Curiosity rover's science lab on Mars.

Talk to one of our engineers. PI has the people to understand your application, the broadest range of motion technologies and best-in-class manufacturing, assembly, process & metrology. Call or email us.

Download the Nanopositioning Catalog
Nanopositioning Products Catalog

Linear Stages Linear Stages
XY Nano-Positioning Stages XY-Positioning Stages
XYZ Nano Positioning Stages XYZ-Positioning Stages
6 Axis Stages 6 Axis Stages
Tilt Stages Z & Tip/Tilt Stages
Flexure Actuators Motors /Flexure Actuators
Tilt Mirrors Fast Tip/Tilt Mirrors
Fast Focus Systems Fast Focus Systems
Single Axis Controllers Single-Axis Controllers
Multi Axis Controllers Multi-Axis Controllers
Download the Nano Positioning Solutions Download the Nanopositioning Solutions Catalog (PDF)
Nanopositioning Systems Overview Nanopositioning Systems Overview
Nano Positioning Basics Nanopositioning Basics


Piezo Nano positioning

Video: Piezoelectric Positioners - Key to
Nanometer Sized Features



Nano Positioning Stages:

Examples of Piezo Positioning Systems:
Optical Microscopy Piezo Stages, Z-Stages, Objective Nanofocusing Systems
Piezo Positioning System Open Frame Microscope Stage Slide Scanner
PInano« XYZ & XY Piezo Positioning Stages for Supermicroscopy M-545 Open-Frame XY Microscope Stage, for Long-Range Sample Positioning High-Speed Piezo-Z Slide Scanner: Low-Profile, Low-Cost, for Super Resolution Microscopy

 Piezo Z Stage Objective lens positioner Microscope Stage
Z-Piezo Positioner Stage for 3-D imaging, travel to 500Ám Objective lens positioner / fast focussing system, variety of travel ranges and objective diameters Piezo motorized XY-microscope stage with scanner insert. 25x25mm travel, fast, low profile

AFM Scanning Piezo Stages, NSOM Scanning Stages, E-Beam Scanning Stages
AFM Scanning Piezo Stages Nano positioner Piezo Stage
PicoCube« piezo nano positioning stage, picometer resolution, very small, 5x5x5Ám closed-loop travel PIMars precision positioning stage, up to 300x300x300 Ám travel, parallel kinematics & metrology for highest precision P-733 piezo positioning stage, non-magnetic, vacuum version. 100x100Ám travel, capacitive feedback.

Low Profile Piezo Systems (XY, Z, Z/Tip/Tilt) w/ aperture
Low Profile Piezo positioning Systems XY & XYZ Piezo Stage Ultra Low Profile XY Scanner
100x100Ám XY Version and the 100Ám x 1 mrad Z-Tip/Tilt Version P-733.2DD and 3DD high-speed XY & XYZ precision positioning stage Low-cost, ultra low profile XY scanner for image dithering / sub-pixel stepping

Linear Stages for Nano-Positioning
Linear Piezo Stage linear stagee with capacitive feedback linear stage with ultra precision flexure guidance
P-611, 100 Ám entry level piezo positioning stage w/ strain gauge feedback P-621.1 piezo positioning stages w/ high accuracy capacitive sensors, 60 to 1800 Ám positioning range. P-752 ultra-high precision piezo positioner

Multi-Axis Piezo Positioning Stages, Z-Tip/Tilt Stages
Z-Tip/Tilt Stage precision positioning Stage Nano Alignment System
Z & Z-Tip/Tilt piezo positioner, up to 200Ám, 4 mrad, Parallel Kinematics, Capacitive Feedback PIMarsÖ piezo precision positioning stage, up to 300x300x300 Ám travel, parallel kinematics & metrology for highest precision P-611 NanoCube«, NanoAlignment system, 100x100x100Ám compact entry level stage w/ strain gauge feedback

6-Axis Piezo Nanopositioning Stages
6-Axis Piezo positioners 6-Axis positioner 3 to 6 axis positioning stage
P-587 piezo positioning system. Up to 800 Ám / 10 mrad six-axis stage, parallel kinematics & metrology for highest precision Piezo Hexapod. 6-axis stage, 10mm linear, 6░ rotation. 50 kg load. PIMars ulta-high accuracy positioner, 3 & 6 axis parallel kinematics & metrology

FSM, Fast Steering Mirrors (piezo Tip/Tilt stages)
FSM Fast Steering Mirror piezo phase shifter
S-334, tip/tilt stage / piezo steering mirror. Up to 120mrad deflection S-330, tip/tilt stage / piezo steering mirror. Sub-millisecond responsivness, up to 20mrad deflection S-303 piezo phase shifter. Very fast response (Fres: 25 kHz).

Flexure Actuators & Z-Piezo Positioning Stages w/o Aperture
Flexure Actuators Z Piezo Z Piezo POsitioners
Flexure Guided Z-Actuator. Motion to 480Ám, open and closed-loop. PIHera« Z-stage family. Motion to 400Ám, capacitive feedback, very compact P-611, 100Ám low cost piezo positioner w/ strain gauge feedback

Long Travel Piezo Positioners
XYZ alignment stage Long Travel Piezo Positioning Stages Hybrid Piezo Positioners
P-615 NanoCube« XYZ alignment stage. Motion to 350Ám. E.g. for optical alignment PIHera« XY-stage positioners. Motion to 1800Ám, capacitive feedback, very compact M-714 and the M-511.HD Hybrid Stages. Combine piezo & servo motor technology. Up to 100 mm travel

Piezo Motors / Linear Actuators
Linear Actuators High Force Piezo Stepping Motor High Speed Piezo Motor
Novel compact OEM Piezo stepping motor / actuator with sub-nanometer precision High-force piezo stepping motor / actuator with sub-nanometer precision High-speed piezo motor / actuator

Custom Piezo Positioning Stages
Miniature Stage Custom Piezo Nano-Positioning Stages Fast Tool Servo Stag
Miniature Stage for read/write head testing Lightweighted, high-load stage for faster response Fast tool servo stage for non-circular turning of metal parts.

Controllers & Piezo Drivers for Precision Positioners
Piezo Nano Positioning Stage Controllers OEM Piezo Controller Board Modular Piezo Nano Positioning Stage
Digital Piezo Controller Card for precision positioners, 3 axis Piezo motion controller for OEMs Advanced digital controller for piezo positioners, modular, very high performance