| PI is the world-leading supplier of piezo stage systems and nanopositioning equipment for applictions such as alignment, scanning and high-speed / high-stability precision positioning. PI piezo nanopositioning stages & systems are equipped with computer modelled frictionless piezo flexure drives and non-contact sensors. The lack of friction makes the stages superior to conventional positioning stages based on crossed roller bearings, etc. in terms of response, repeatability (even of nanometer and sub-nanometer sized steps) straightness and flatness. Because guidance, piezoelectric drives and sensors in PI nanopositioning piezo stage systems are truly frictionless they can easily achieve repeatability and minimum incremental motion in the subnanometer realm. |
Nanopositioning Catalog |
Video: Piezo Nanopositioning - Key to
Nanometer Sized Features
| Examples of Piezo Nanopositioning Stages: | ||||
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| Optical Microscopy Piezo Stages, Z-Stages, Objective Nanofocusing Systems | ||||
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| PI nano™ 1x3 XYZ & XY Piezo Nano positioning Stage Systems for Supermicroscopy | M-545 Open-Frame Microscope Stage Long-Range Motion for Sample Positioning | High-Speed Piezo-Z Slide Scanner: Low-Profile, Low-Cost, for Super Resolution Microscopy | ||
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| Z-Piezo Nanopositioning Stage for 3-D imaging, up to 500 µm travel | Objective lens positioner / fast focussing system, variety of travel ranges and objective diameters | Piezomotor XY-microscope stage with scanner insert. 25x25 mm travel, fast, low profile | ||
| AFM Scanning Piezo Stages, NSOM Scanning Stages, E-Beam Scanning Stages | ||||
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| PicoCube® piezo nano positioning stage, picometer resolution, very small, 5x5x5µm closed-loop travel | PIMars™ Nanopositioning stage, up to 300x300x300 µm travel, parallel kinematics & metrology for highest precision | P-733 piezo nano positioning stage, non-magnetic, vacuum version. 100x100µm travel, capacitive feedback. | ||
| Low Profile Piezo Nanopositioning Systems (XY, Z, Z/Tip/Tilt) w/ aperture | ||||
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| 100x100µm XY Version and the 100µm x 1 mrad Z-Tip/Tilt Version | P-733.2DD and 3DD high-speed XY & XYZ piezo nanopositioning stage | Low-cost, ultra low profile XY scanner for image dithering / sub-pixel stepping | ||
| Single Axis Piezo Nanopositioning Systems | ||||
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| P-611, 100 µm entry level piezo nanopositioning stage w/ strain gauge feedback | P-621.1 piezo nanopositioning stages w/ high precision capacitive feedback, 60 to 1800 µm travel. | P-752 piezo nanopositioning stage with ultra precision flexure guidance | ||
| Multi-Axis Piezo Nanopositioning Stages, Z-Tip/Tilt Stages | ||||
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| Z & Z-Tip/Tilt piezo nano positioning stage, up to 200 µm, 4 mrad, Parallel Kinematics, Capacitive Feedback | PIMars™ piezo nano positioning stage, up to 300x300x300 µm travel, parallel kinematics & metrology for highest precision | P-611 NanoCube®, NanoAlignment system, 100x100x100µm compact entry level stage w/ strain gauge feedback | ||
| 6-Axis Piezo Nanopositioning Stages | ||||
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| P-587 piezo nano positioning stage. Up to 800 µm / 10 mrad six-axis stage, parallel kinematics & metrology for highest precision | Piezo Hexapod. 6-axis stage, 10mm linear, 6° rotation. 50 kg load. | PIMars™ stage, 3 to 6 axis versions, parallel kinematics & metrology for highest precision | ||
| Steering Mirrors (Tip/Tilt piezo nanopositioning stages) | ||||
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| S-334, long-travel piezo tip/tilt steering mirror. Up to 100 mrad deflection | S-330, piezo tip/tilt steering mirror. Sub-millisecond response, up to 20mrad deflection | S-303 phase shifter. Very fast response (25 kHz resonant frequency). | ||
| Flexure Actuators & Z-Piezo Nanopositioning Stages w/o Aperture | ||||
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| PiezoMove® Flexure Z-Actuators / stages. Up to 480µm travel, closed-loop option. | PIHera® Z-stage family. Up to 400µm, capacitive feedback, very compact | P-611, 100µm entry level stage w/ strain gauge feedback | ||
| Long Travel piezo nanopositioning stages | ||||
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| P-615 NanoCube® XYZ alignment stage. Up to 350 µm. Ideal for photonics alignment | PIHera® XY-stage family. Up to 1800 µm, capacitive feedback, very compact | M-714 and the M-511.HD Hybrid Stages. Combine piezo & servo motor technology. Up to 100 mm travel | ||
| Piezo Motors / Linear Actuators | ||||
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| Novel compact OEM Piezo stepping motor / actuator with sub-nanometer precision | High-force piezo stepping motor / actuator with sub-nanometer precision | High-speed piezo motor / actuator | ||
| Custom Piezo Nanopositioning Stages | ||||
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| Miniature Stage for read/write head testing | Lightweighted, high-load stage for faster response | Fast tool servo stage for non-circular turning of metal parts. | ||
| Piezo Nanopositioning Stage Controllers & Piezo Drivers | ||||
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| Digital PCI piezo nano positioning stage controller, 3 axis | OEM piezo controller board | High-performance modular piezo nano positioning stage controller | ||
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| Measuring Nanometers: Stage Metrology Selection | ||||||||||||||||||||||||||||
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Achieving nanometer and subnanometer precision requires more than a piezo-driven stage capable of making moves on this precision scale. The stage internal metrology system must also be capable of measuring motion on the nanometer scale. The primary characteristics to consider when selecting a stage metrology system are linearity, sensitivity (resolution), stability, bandwidth, and cost. Other factors include the ability to measure the moving platform directly and contact vs. noncontact metrology. Three types of sensors are typically used in piezoelectric nano positioning applications — capacitive, strain, and LVDT. See Table 1 below for a summary of the characteristics of each sensor type. PI capacitive sensors measure the gap between two plates based on electrical capacitance. These sensors can be designed to become an integral part of a nano positioning system, with virtually no effect on size and mass (inertia). Capacitive sensors offer the highest resolution, stability, and bandwidth. They enable direct measurement of the moving platform and are noncontact. Capacitive sensors also offer the highest linearity (accuracy). PI's capacitive sensors / control electronics use a high-frequency AC excitation signal for enhanced bandwidth and drift-free measurement stability (subnanometer stability over several hours, see here). PI’s exclusive ILS linearization system further improves system linearity. If used with PI’s digital controllers, digital polynomial linearization of mechanics and electronics makes possible overall system linearity of better than 0.01%. Capacitive sensors are the metrology system of choice for the most demanding applications. A strain gauge sensor is a resistive film bonded to a piezo stack or—for enhanced precision—to the guiding system of a flexure stage. It offers high resolution and bandwidth and is typically chosen for cost-sensitive applications. As a contact type sensor, it measures indirectly, in that the position of the moving platform is inferred from a measurement at the lever, flexure or stack. PI employs full-bridge implementations with multiple strain gauges per axis for enhanced thermal stability. PI's PICMA® drive technology also enables higher performance of actuator-applied strain gauge sensors. LVDT sensors measure magnetic energy in a coil. A magnetic core attached to the moving platform moves within a coil attached to the frame producing a change in the inductance equivalent to the position change. LVDT sensors provide noncontact, direct measurements of position. They are cost-effective and offer high stability and repeatability. |
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Table 1
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| * Note. The ratings describe the influence of the sensor on the performance of the complete nanopositioning system. Resolution, linearity, repeatability, etc. specifications in the PI product data sheets indicate the performance of the system including the controller, mechanics and sensor. They are verified using advanced external nanometrology equipment such as Zygo Interferometers. It is important not to confuse these figures with the theoretical performance of the sensor alone. ** Strain type sensors (metal foil, semiconductor, or piezoresistive) infer position information from strain. |
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Ultra-Low-Inertia Nano positioning Systems, Ultra-High Precision Position Sensors Ultra-low-inertia solid-state piezo systems can repeatedly move bidirectional nanometer level steps, at up to hundreds of Hz if required. | |
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PI offers the largest variety of custom and standard ultra-low inertia Nano-Positioning solutions.
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Capacitive position sensors are the metrology system of choice for the most demanding applications.
Two plate capacitive sensors ensure highest precision, linearity and longterm stability. These absolute-measuring, non-contact sensors detect motion at sub-nanometer levels directly (direct metrology) and provide linearity, accuracy, resolution, stability and bandwidth superior to strain gauge type sensors (piezo resistive sensors), LVDT sensors and incremental encoders (glass scale type encoders). If used in parallel-kinematics multi-axis piezo nano-positioning systems they can also provide the information for automatic runout-compensation. Minimized recoil forces are a by-product of the ultra-low-inertia approach. Classical motorized stages, even when equipped with high-resolution encoders cannot achieve this precision. Their higher inertia, friction, and servo dither prevent fast motion at the nanometer level. |
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Flexures for Superior Guiding Accuracy Because flexure motion is based on the elastic deformation (flexing) of a solid material, friction and stiction are entirely eliminated. Flexures exhibit high load capacity, stiffness, and resistance to shock and vibration. Flexures are maintenance free and not subject to wear. They are vacuum compatible, operate over a wide temperature range and require neither lubricants nor compressed air for operation, as air bearings do. Not all flexures are created equal! PI multi-axis nano positioning systems are based on FEA calculated wire-EDM-cut parallel-kinematics flexure designs. These multilink flexure guiding systems eliminate cosine errors and provide bidirectional flatness and straightness in the nanometer or microradian range. This high precision means that even the most demanding positioning tasks can be run bidirectionally for higher throughput. |
 Wire-EDM cutting process provides highest-accuracy flexure guiding systems in compact nanopositioning stages. Typical 0.5 µrad bidirectional trajectory repeatability (P-752.11C piezo nanopositioning stage) means processes may be performed bidirectionally for twice the productivity (graph, right) |  |
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Lifetime / Long Life PICMA® Piezoelectric Actuators
PI nano positioning systems employ the award-winning PICMA® piezoelectric actuators, the only actuators with co-fired ceramic encapsulation. The PIMCA® piezo technology was specifically developed by PI’s piezoceramic division to provide higher performance and lifetime in nano-positioning applications. Piezoelectric multilayer actuators are similar to ceramic capacitors and are not affected by wear and tear. PI nano positioning systems are designed to provide long travel at lower voltages than most other piezo systems. The research literature, PI’s own test data and 30+ years of experience, all confirm that lower average electric fields lead to longer lifetime.  Nanopositioning Linear Stage Selection Guide!
Nanopositioning Multiaxis Stage Selection Guide!
Tip/Tilt & Z- Nanopositioning Stage Selection Guide!
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Active Trajectory Control is avail- Active Trajectory Control significantly improves guid- |
Active Trajectory Control
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| DDL Improves Scanning Linearity up to 1000-Fold | ||
 Elliptical scan in a laser micro-drilling application with XY piezo stage, conventional controller. The outer curve describes the target position, the inner curve shows the actual motion of the piezo stage.  Same scan as before, with Dynamic Digital Linearization. The tracking error has been reduced to a few nanometers, real and target positions are indiscernable in the graph | Preshaping™ algorithms and dynamic digital linearization can increase the dynamic linearity and effective bandwidth of high-speed piezo nano positioning systems by up to 3 orders of magnitude. This translates into higher dynamic accuracy, and increased throughput. Conventional PID (proportional-integral-derivative) piezo controllers cannot completely eliminate phase lag and tracking errors (the difference between actual and target positions) in dynamic operation. This is due to the nonlinear nature of piezoelectric material (PZT), the limited control bandwidth, and the fact that a PID controller needs to see an error before it attempts to correct it. DDL solves this problem. PI offers DDL as an option for digital controllers such as the E-710. This PI-exclusive technology reduces tracking errors (the difference between the commanded position and actual position) and phase lag in dynamic applications to virtually indiscernible levels. The result is an improvement in dynamic linearity and usable bandwidth of up to three orders of magnitude. Dynamic Digital Linearization works both in single-axis and multi axis applications (see graphs). | |
Vibration Elimination
The example above shows ringing of a poorly damped component on a high-speed piezo nanopositioning stage. While the closed-loop piezo stage settles perfectly, the component cannot keep up. Conventional solutions to this problem would involve slowing down the Nanopositioning stage. Mach™ eliminates ringing without sacrificing speed. It does not even require retuning of the servo system. |
The exclusive Mach™ Throughput Processor™ eliminates resonant ringing, allowing rapid motion without a
settling phase.This technique also eliminates resonances excited in neighboring components, outside the
nano positioning system's servo loop. The result is significantly increased throughput.
 
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| The example above shows vibrations induced at the beginning of a saw-tooth scan, typical in image acquisition applications. The vibration results in lower image quality. Mach™ improves the image quailtiy; there is no need to reduce the scanning frequency or chang the mechanical components in the system. Mach™ is available as a firmware option for several PI Digital Piezo Controllers and also as an upgrade option for analog controllers. | ||
| This technology is protected by one or more of the following US
and foreign Patents licensed from Convolve, Inc.: US 4,916,635; US 5,638,267;
0433375 Europe; 067152 Korea, and other Patents pending. Mach™, Throughput Coprocessor™
and NanoAutomation® are trademarks of Polytec PI, Inc. Input Shaping™ is a trademark of Convolve, Inc.
Jump to the Nanopositioning Selection Guide! |
| Parallel Kinematics Piezo-Driven Nanopositioning Systems | ||||
| Serial Kinematics vs. Parallel Kinematics in Nanopositioning Systems | ||||
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| More Parallel Kinematics: Hexapods |
| Nanopositioning Stage Selection Guide |
| Jump to Piezo Actuator Selection Guide |
| Compact Stages Without Sensors |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-713 | Compact XY-piezo stage scanner, fast. | XY | 15 | - |
| P-280 | Nanopositioning piezo stage, XY and XYZ combinations. |
X | 30, 50, 100 | - |
| P-290 | Nanopositioning Z-piezo stage. Long travel range | Z | 1000 | - |
| P-287 | Z-axis and tip/tilt nanopositioning stage, long travel range. |
Z, θx | 700, 12 mrad | - |
| P-772 | Ultracompact Flexure Guided Piezo System | X | 10 | - |
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| Objective Nanofocusing Systems / Z-Stages |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-725 | PIFOC®. objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology. |
Z | 100, 250, 400 | Capacitive |
| P-721.CDQ P-721.LLQ |
PIFOC®. objective nanofocusing Piezo system, very fast and accurate, with QuickLock mounting system, direct metrology. |
Z | 100 | Capacitive / LVDT |
| P-720 | PIFOC®. objective nanofocusing system, very compact, without sensors. |
Z | 100 | - |
| P-541.Z | Low-profile Z-stage, 80 x 80 mm aperture. | Z | 100 | Capacitive / SGS |
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| Closed-Loop 1- and 2-Axis Stages with Strain Gauge Sensors |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-611.1, P-611.2 |
Compact, low-cost X and XY Piezo nanopositioning stages. | X, XY | 100 | SGS |
| P-611.ZS, P-611.XZS |
Compact, low-cost X and XY Piezo nanopositioning stages. | Z, XZ | 100 | SGS |
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| Closed-Loop Single-Axis Stages with Direct Metrology Sensors (Direct metrology provides increased accuracy) |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-601 | Flexure-Guided OEM Piezo Actuator | Z | 400 | SGS/- |
| P-622.Z - P-622.Z |
PIHera® Z-axis Piezo nanopositioners, compact, very accurate, long travel range. |
Z | 50, 100, 250 | Capacitive |
| P-772 | Piezo Nanopositioning stage, very compact, fast and accurate | X | 10 | Capacitive |
| P-780 | Piezo Nanopositioning stage, compact, fast, stainless steel | X | 80 | LVDT |
| P-750 | High-load nanopositioning stage, very good guidance, high stiffness. |
X | 75 | Capacitive / LVDT |
| P-752 | Nanopositioning stage. Very fast and accurate, outstanding guiding accuracy. |
X | 15, 30 | Capacitive |
| P-753 | Piezo Nanopositioning stage and actuator in one, very compact, fast and accurate. |
Z & X | 12, 25, 38 | Capacitive |
| P-620.1 - P-628.1 |
PIHera® piezo nanopositioners, compact, very accurate, long travel ranges, excellent value |
X (XY, Z) | 50, 100, 250, 500, 950 | Capacitive |
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| Multi-Axis Stages, Modular Stages (Serial Kinematics) |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-281 / P-282 |
Compact open-loop, modular, piezo nanopositioning stages. |
XY, XYZ | 30, 50, 100 | - |
| P-612 | Compact, low-cost, XY piezo stage. 100 x 100 µm travel, clear aperture. |
XY | 100 x 100 | SGS |
| P-611.3 | NanoCube® XYZ piezo alignment system, compact, very cost-effective. |
XYZ | 100 | SGS |
| P-620.2 - P-625.2 |
PIHera® XY piezo nanopositioners, Very compact & accurate (direct metrology), long travel range. |
XY (Z, XYZ) | 50, 100, 250, 500 | Capacitive |
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| Multi-Axis Stages, Parallel Kinematics / Parallel Metrology (Parallel kinematics and parallel metrology allow active trajectory control, better dynamics and higher multi-axis precision) |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-615 | NanoCube® 350C XYZ piezo alignment system, clear aperture, ideal for fiber alignment. |
XYZ | to 350 / Axis | Capacitive |
| P-363 | PicoCube® high-precision piezo system for AFM, SPM, nanomanipulation; 50 picometer resolution. |
XY, XYZ | 5 / Axis | Capacitive |
| P-541 P-542 |
Low profile XY scanning stage 80 x 80 mm aperture. |
XY | to 200 in XY | Capacitive |
| P-733 | XY piezo scanning stage 50 x 50 mm aperture, vacuum versions available. |
XY | 100 x 100 | Capacitive |
| P-733.2DD / P-733.3DD |
High-speed scanning piezo stage, XY and XYZ versions, ideal for tasks like scanning microscopy. |
XY, XYZ | 30 x 30 (x10) | Capacitive |
| P-734 | XY nanoscanning stage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture.. |
XY | 100 x 100 | Capacitive |
| P-734 | PInano™ Z Scanner, Low-Profile, Low-Cost, Nanopositioning System for Super Resolution Microscopy | Z | 100, 200 | Piezo Resistive |
| P-517 - P-527 |
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ, XYθz |
to 200 in XY, 10 in Z, to 2 mrad |
Capacitive |
| P-561.3DD | PIMars™ XYZ scanning stages, faster, direct drive, excellent guidance, 66 x 66 mm clear aperture. |
XY, XYZ | 45 XY, 11 Z | Capacitive |
| P-561 - P-563 |
PIMars™ multi-axis stages; travel range to 300 x 300 x 300 µm , 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ | to 300 x 300 x 300 |
Capacitive |
| P-587 | 6-axis-nanopositioning stage. | XYZ, θxθyθz | up to 800 / 10 mrad |
Capacitive |
| P-518 - P-558 |
Z-axis and tip/tilt platforms clear aperture | Z, θxθy | to 200 in Z, 4 mrad |
Capacitive |
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| Z-Axis and Tip/Tilt Platforms Tip/tilt platforms / mirrors see "Active Optics / Steering Mirrors" section |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-541.Z | Low-profile Z-stage, 80 x 80 mm aperture. | Z & Z, Tip/Tilt |
100 | Capacitive / SGS |
| P-518 - P-558 |
Z-axis and tip/tilt platforms 66 x 66 mm clear aperture |
Z & Z, Tip/Tilt |
to 200 in Z, 4 mrad |
Capacitive |
| P-620.Z - P-622.Z |
PIHera® Z-axis nanopositioners, compact, very accurate, long travel range. |
Z | 50, 100, 250 | Capacitive |
| P-611.ZS, P-611.XZS |
Compact, low-cost Z and XY nanopositioning stages | Z, XZ | 100 | SGS |
| P-783 | Nanopositioning Z-stage. Long travel range, compact. | Z | 300 | LVDT |
| P-290 | Nanopositioning Z-stage, very long travel range, open-loop. |
Z | 1000 | - |
| P-287 | Z-axis and tip/tilt nanopositioning stage, long travel range, open-loop. |
Z, θx | 700, 12 mrad | - |
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| Scanning (Microscopy) Stages with Clear Aperture |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-725 | PIFOC® objective nanofocusing system, compact, light-weight, long travel ranges, QuickLock mounting system, direct metrology |
Z | 100, 250, 400 | Capacitive |
| P-541.Z | Low-profile Z-stage, 80 x 80 mm aperture | Z & Z, Tip/Tilt |
100 | Capacitive / SGS |
| P-518 - P-558 |
Z-axis and tip/tilt platforms clear aperture Tip/Tilt |
Z & Z | to 200 in Z, 4 mrad |
Capacitive |
| P-612 | Compact, low-cost, XY stage. 100 x 100 µm travel, clear aperture. |
XY | 100 x 100 | SGS |
| P-541 P-542 |
Low profile XY scanning stage 80 x 80 mm aperture |
XY | to 200 in XY | Capacitive / SGS |
| P-545 | PI nano™ XY(Z) low profile piezo stage for superresolution microscopy, large aperture, includes advanced controller: 24-Bit, USB, TCP/IP, RS-232 and Analog Interface M-545 manual stage option | XY(Z) | to 200 x 200 x 200 µm |
Piezo Resistive |
| P-733 | XY piezo scanning stage 50 x 50 mm aperture, vacuum versions available. |
XY | 100 x 100 | Capacitive |
| P-733.2DD, P-733.3DD |
High-speed scanning stage, XY and XYZ versions, ideal for tasks like scanning microscopy |
XY, XYZ | 30 x 30 (x10) | Capacitive |
| P-734 | XY nanoscanning stage, extremely flat and straight (1 – 2 nm); 56 x 56 mm clear aperture. |
XY | 100 x 100 | Capacitive |
| P-736 | XY Piezo Nanopositioner Stage,. 200 x 200 mm clear aperture. |
Z | 200 x 200 | LVDT |
| P-517, P-527 |
Multi-axis stage 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available. |
XY, XYZ, XYθz | to 200 in XY, 20 in Z, to 4 mrad |
Capacitive |
| P-561 - P-563 |
PIMars™ multi-axis stages; travel range. to 300 x 300 x 300 µm , 66 x 66 mm clear aperture, custom model with 6 degrees of freedom available |
XY, XYZ | to 300 x 300 x 300 | Capacitive |
| 6-Axis Parallel Kinematics Stages |
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| Models* | Description | Axes | Travel [µm] | Sensor |
| P-587 | 6-axis-nanopositioning stage | XYZ, θxθyθz | up tp 800 / 10 mrad | Capacitive |
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* Ask about custom sizes, sensors or special designs. Capacitive and LVDT sensors are direct metrology devices. Capacitive sensors provide the highest accuracy, bandwidth and linearity. |
| Introduction to Piezoelectric Nanopositioning Actuators (Nano-Transducers) | ||
| Piezo Actuators (PZT) are ultra-high-resolution Nano-Transducers for a variety of applications from Nanotechnology
to Aerospace and Biotechnology. PI offers the largest selection Piezo Actuators and Translators (linear actuators) worldwide, for scientific and and industrial applications.
In addition to the hundreds of standard models, we manufacture custom designs tailored to customers’ requirements. PI is highly vertically integrated, controlling each manufacturing step from piezo raw materials to finished systems. | ||
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Applications for Piezo Actuators
Award-Winning PICMA® Piezo Technology
PI's Piezoceramics Division (PI Ceramic Website)
Piezo Actuator Experience Mounting Guidelines for Piezo Actuators
Piezo-University: Designing with Piezoelectrics
PILine Ultrasonic Linear Piezomotors / Stages. Nanopositioning Systems, Scanning Stages
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| Piezo Actuators, Piezo Ceramics Selection Guide |
| Jump to Nanopositioning Stages Selection Guide |
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Piezo Stack Actuators with No Casing: Mini Actuators (Chip), PICMA
® Multilayer, PICA- & PICA-Power Actuators |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| PL022 PL033 PL055 |
PICMA®-Chip. Smallest multilayer piezo actuators, from 2 x 2 x 2 mm |
tos 1000 / 5** | 2, 3 | - |
| P-882 - P-888 |
PICMA® piezo actuators with cofired ceramic encapsulation, long lifetime, cross-sections: 2 x 3 to 10 x 10 mm |
to 4000 / 20** | 5, 9, 15, 30 | - |
| P-007 - P-056 |
PICA™-Stack piezo actuators, wide variety, high-force capacity |
to 80000 / 300** | 5 to 300 | optional |
| P-010.xxP - P-056.xxP |
PICA™-Power. stack actuators, wide variety, for high-level dynamics and high temperatures |
to 80000 / 300** | 5 to 300 | optional |
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| Small Piezo Stack Actuators With Steel Casing |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-810 | Only 6 mm diameter, ferromagnetic end pieces | 50 / 1 | 15, 30, 45 | - |
| P-820 | Smallest preloaded piezo translator | 50 / 10 | 15, 30, 45 | - |
| P-250 | Piezo tip for micrometer | 100 / 5 | 20 | - |
| P-830 | Compact, ferromagnetic endpieces | 1000 / 5 | 15, 30, 45, 60 | - |
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| Preloaded Piezo Stack Actuators for Medium Loads, with Position Sensor (optional) |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-840 / P-841 |
Preloaded, optional ball tip | 1000 / 50 | 15, 30, 45, 60, 90 | SGS |
| P-842 / P-843 |
Preloaded, higher tensile limit than P-840 | 800 / 300 | 15, 30, 45, 60, 90 | SGS |
| P-170 - P-178 |
Variety of tips available | 2000 / 50 | 5, 10, 20, 40, 80 | SGS |
| P-212, P-216 P-225, P-235 |
Preloaded, very high stiffness, optional waterproof case. |
2000 / 300, 4500 /500 |
15 to 120, 15 to 180 |
SGS |
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| Preloaded High-load Piezo Stack Actuators, with Position Sensor (optional) |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-844 / P-845 |
Preloaded, optional waterproof case | 3000 / 700 | 15, 30, 45, 60, 90 | SGS |
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| Preloaded Ultra High-load Piezo Stack Actuators, with Position Sensor (optional) |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-212, P-216 P-225, P-235 |
Preloaded, very high stiffness, optional waterproof case. |
2000 / 300, 4500 /500 |
15 to 120, 15 to 180 |
SGS |
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| Ultra-High-Precision Actuators with Flexure Guidance and Direct Metrology Sensors |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-753 | Flexure guidance, ultra-precise | 100 / 20 | 12, 25, 38 | Capacitive, directmetrology |
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| Actuators with Long Travel Ranges (up to 1 mm) and Flexure Guidance |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-290 | Long-range piezo translator, 1 mm travel, with flexure guidance |
50 / 10 | 1000 | - |
| P-287 | Travel range to 0.7 mm, with flexure guidance, rotation to 12 mrad | 80 / 10 | 700 µm, 12 mrad | - |
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| Shear Actuators: X, XY, XYZ |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-111 - P-151 |
PICA™-Shear shear-effect actuator: Compact, X, XY, XYZ, e.g. for scanning-microscopy, optional clear aperture | 10 to 300 | 1 to 10 x 10 x 10 | - |
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| Piezo Tube and Tubular Stack (Ring) Actuators |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| P-010.xxH - P-025.xxH |
PICA™-Thru ring actuators combine the advantages of piezo tubes with the high forces of stack actuators | to 60000 / 250** | 5 to 300 | optional |
| PT120 - PT140 |
PT-Tube piezo tube actuators, minimum tolerances | 0,1 / 0,1 | 4, 6, 8 | - |
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| Bender Actuators / Bimorph Actuators (travel ranges to 2 mm) |
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| Models* | Description | Compressive / Tensile Limits [N] |
Travel [µm] | Sensor |
| PL122 - PL140 |
PICMA® multilayer bender actuators, cofired ceramic encapsulation, low operating voltage | 1 / 1 | 500, 900, 2000 | - |
| P-871 | PICMA® multilayer bender actuators with position sensors | 1 / 1 | 160 bis 1600 | - |
| P-288 | Disk translators (flat, long travel range) | 10 / 5 | 50 | - |
| P-286 / P-289 |
Disk translators (flat, long travel range) | 20 / 10 | 100, 200 | - |
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| Linear Piezomotors and Long-Travel Actuators |
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* Ask about custom sizes, sensors or special designs.
** Preloading increases tensile force capacity
SGS = high-resolution strain gauge sensor LVDT = Linear Variable Differential Transformer
Further information about piezoceramics can be found in the PI Ceramic catalog or at www.piceramic.de.
