| Examples of Piezo Positioning Systems: |
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Optical Microscopy Piezo Stages, Z-Stages, Objective Nanofocusing Systems |
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| PInano® XYZ & XY Piezo Positioning Stages for Supermicroscopy |
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M-545 Open-Frame XY Microscope Stage, for Long-Range Sample Positioning |
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High-Speed Piezo-Z Slide Scanner: Low-Profile, Low-Cost, for Super Resolution Microscopy |
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| Z-Piezo Positioner Stage for 3-D imaging, travel to 500µm |
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Objective lens positioner / fast focussing system, variety of travel ranges and objective diameters |
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Piezo motorized XY-microscope stage with scanner insert. 25x25mm travel, fast, low profile |
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AFM Scanning Piezo Stages, NSOM Scanning Stages, E-Beam Scanning Stages |
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| PicoCube® piezo nano positioning stage, picometer resolution, very small, 5x5x5µm closed-loop travel |
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PIMars precision positioning stage, up to 300x300x300 µm travel, parallel kinematics & metrology for highest precision |
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P-733 piezo positioning stage, non-magnetic, vacuum version. 100x100µm travel, capacitive feedback. |
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Low Profile Piezo Systems (XY, Z, Z/Tip/Tilt) w/ aperture |
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| 100x100µm XY Version and the 100µm x 1 mrad Z-Tip/Tilt Version |
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P-733.2DD and 3DD high-speed XY & XYZ precision positioning stage |
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Low-cost, ultra low profile XY scanner for image dithering / sub-pixel stepping |
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Linear Stages for Nano-Positioning |
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| P-611, 100 µm entry level piezo positioning stage w/ strain gauge feedback |
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P-621.1 piezo positioning stages w/ high accuracy capacitive sensors, 60 to 1800 µm positioning range. |
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P-752 ultra-high precision piezo positioner |
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Multi-Axis Piezo Positioning Stages, Z-Tip/Tilt Stages |
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| Z & Z-Tip/Tilt piezo positioner, up to 200µm, 4 mrad, Parallel Kinematics, Capacitive Feedback |
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PIMars™ piezo precision positioning stage, up to 300x300x300 µm travel, parallel kinematics & metrology for highest precision |
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P-611 NanoCube®, NanoAlignment system, 100x100x100µm compact entry level stage w/ strain gauge feedback |
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6-Axis Piezo Nanopositioning Stages |
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| P-587 piezo positioning system. Up to 800 µm / 10 mrad six-axis stage, parallel kinematics & metrology for highest precision |
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Piezo Hexapod. 6-axis stage, 10mm linear, 6° rotation. 50 kg load. |
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PIMars ulta-high accuracy positioner, 3 & 6 axis parallel kinematics & metrology |
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FSM, Fast Steering Mirrors (piezo Tip/Tilt stages) |
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| S-334, tip/tilt stage / piezo steering mirror. Up to 120mrad deflection |
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S-330, tip/tilt stage / piezo steering mirror. Sub-millisecond responsivness, up to 20mrad deflection |
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S-303 piezo phase shifter. Very fast response (Fres: 25 kHz). |
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Flexure Actuators & Z-Piezo Positioning Stages w/o Aperture |
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| Flexure Guided Z-Actuator. Motion to 480µm, open and closed-loop. |
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PIHera® Z-stage family. Motion to 400µm, capacitive feedback, very compact |
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P-611, 100µm low cost piezo positioner w/ strain gauge feedback |
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Long Travel Piezo Positioners |
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| P-615 NanoCube® XYZ alignment stage. Motion to 350µm. E.g. for optical alignment |
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PIHera® XY-stage positioners. Motion to 1800µm, capacitive feedback, very compact |
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M-714 and the M-511.HD Hybrid Stages. Combine piezo & servo motor technology. Up to 100 mm travel |
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Piezo Motors / Linear Actuators |
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| Novel compact OEM Piezo stepping motor / actuator with sub-nanometer precision |
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High-force piezo stepping motor / actuator with sub-nanometer precision |
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High-speed piezo motor / actuator |
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Custom Piezo Positioning Stages |
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| Miniature Stage for read/write head testing |
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Lightweighted, high-load stage for faster response |
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Fast tool servo stage for non-circular turning of metal parts. |
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Controllers & Piezo Drivers for Precision Positioners |
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| Digital Piezo Controller Card for precision positioners, 3 axis |
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Piezo motion controller for OEMs |
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Advanced digital controller for piezo positioners, modular, very high performance |