XY / XYZ Nanopositioning Stages & 6-Axis Stages

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XYZ Stages

6-Axis Stages

Video: Piezo Nanopositioning Stages by PI

XY Nanopositioning Stages

XYZ Nanopositioning Stages


P-915K Low-Cost OEM XY Piezo Scanner for Imaging, 4x4µm		P-313 PicoCube™ XYZ Piezo Scanner with Picometer Precision, 1µm High Bandwidth, No Servo Lag, for Scanning Probe Microscopy

Highly Cost-Efficient Open-Loop Design
For Pixel Sub-Stepping, Image Resolution Enhancement
4x4µm Scanning / Positioning Range
Compact: 40x 60x7 mm
Parallel Kinematics= Higher Dynamics & Accuracy

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20 Picometers Resolution, <1 nm Hysteresis
Ultra-High-Performance Scanner for AFM/SPM
New Drive Concept for Very High Bandwidth w/o Servo Lag
Compact Manipulation Tool for Bio-/Nanotechnology
High Resonant Frequency 11 khz (Z) 4.0 kHz (X,Y)
1 µm Travel Range

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P-313 PicoCube™ XY Ultra-Linear Piezo Scanner with Picometer Precision High Bandwidth, No Servo Lag, for Scanning Probe Microscopy		P-363 PicoCube™ XYZ Piezo Scanner for AFM, Scanning Probe Microscopy 5x5x5µm

20 Picometers Resolution, <1 nm Hysteresis
Ultra-High-Performance Scanner for AFM/SPM
New Drive Concept for Very High Bandwidth w/o Servo Lag
Compact Manipulation Tool for Bio-/Nanotechnology
High Resonant Frequency 4.0 kHz
1 µm Travel Range

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Closed-Loop Scanner for Atomic Force Microscopy, SPM
Nano-Manipulator for Bio &Nanotechnology
50 Picometer Resolution
Fast: High Resonant Frequency 9.8 kHz
Capacitive Parallel-Metrology Automatically Compensates Guiding Errors
5µm XYZ Scanning / Positioning Range
Vacuum Option

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P-363 PicoCube™ XY Piezo Scanner for AFM, Scanning Probe Microscopy 5x5µm		P-733 XYZ Piezo-Nanopositioning Stage with Aperture for Microscopy, 100x100x10µm High Performance Stage well Suited for STED

20 Picometers Resolution, <1 nm Hysteresis
Ultra-High-Performance Scanner for AFM/SPM
New Drive Concept for Very High Bandwidth w/o Servo Lag
Compact Manipulation Tool for Bio-/Nanotechnology
High Resonant Frequency 4.0 kHz
1 µm Travel Range

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100x100x10µm Standard Scanning / Positioning Range
Direct Drive, High-Speed Versions for Particle Tracking
Capacitive Sensors provide Resolution to 0.1 Nanometers
Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
Frictionless, EDM cut Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Vacuum and Non-Magnetic Versions

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P-713 Low Profile XY Piezo Scanner with Aperture, 20x20µm Cost-Effective OEM System with Low Profile		P-915K Vacuum Compatible XYZ Piezo Nanopositioning Stage, 100µm,200x200mm Aperture, High-Dynamics, High-Load Nanopositioner

For Pixel Sub-Stepping, Image Resolution Enhancement
6 mm Low Profile with Clear Aperture
Cost-Effective Design
To 20x20µm Scanning / Positioning Range
Parallel Kinematics = Higher Dynamics & Accuracy
Frictionless, EDM cut Flexure Guiding System

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100µm XYZ Scanning / Positioning Ranges
1 Nanometer Resolution
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
Excellent Straightness: <0.1 µrad Runout
Frictionless, High-Precision Flexure Guiding System
Vacuum Compatible to 10^-6 hPa

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P-915K High-Dynamics XY Piezo Scanner, 15x15µm Cost-Effective OEM Stage for Imaging w/ 30x45 mm Aperture		P-611 NanoCube XYZ Piezo Nanopositioner, 120µm Compact & Cost Effective 3-Axis Piezo System

For Pixel Sub-Stepping, Image Resolution Enhancement
Highest Dynamics with Direct Piezo Drive
Cost-Efficient Design
15x15µm Scanning / Positioning Range
5 N Load Capacity
Frictionless, EDM cut Flexure Guiding System

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Cost-Effective Piezo Mechanics & Controller System Solution
Strain Gauge Sensor Versions & Open Loop Versions
120µm XYZ Scanning / Positioning Range
Small Footprint 44x44 mm
Frictionless, EDM Cut Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
XY, X & Z Systems also Available

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P-612 XY Piezo Nanopositioning Stage with Aperture, 100x100 µm For Cost-Sensitive Applications		PInano XYZ Piezo Scanning Stage for SR Microscopy, 200 x 200µm Large Aperture for Slides and Petri Dishes

100x100 Closed-Loop Positioning / Scanning Range (130µm in Open-Loop)
Small Footprint 60x60mm, 20x20mm Aperture
Parallel-Kinematics for Enhanced Responsiveness
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
For Cost-Sensitive Applications
Frictionless, EDM cut Flexure Guiding System

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200µm XYZ Scanning / Positioning Range
Direct-Drive Version for Higher Dynamics
Choice of Sensors: PiezoResisive (Lower Cost) or Capacitive (Higher Performance)
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Economical System with High Performance Controller

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P-734 Ultra-Low Runout XY Piezo Nanopositioning Stage, 100x100 µm Low Bow Scanner with High-Dynamics & Clear Aperture		PIHera® Compact XYZ Piezo Nanopositioning Stages , 50 to 1800 µm Cost Efficient & High-Accuracy

Ultra-Precision Trajectory Control, for Scanning Microscopy & Surface Metrology
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
Frictionless, EDM cut Flexure Guiding System
100x100µm Scanning / Positioning Range
Capacitive Sensors for High Linearity
< 0.4 Nanometers Resolution
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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To 1800µm XY Scanning / Positioning Ranges, to 400µm in Z
High-Precision, Cost-Efficient
Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
Frictionless, High-Precision Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Vacuum Option

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P-733 XY Piezo-Nanopositioning Stage with Aperture for Microscopy, 100x100µm High Performance Stage Well-Suited for STED		P-517, P-527 Multi-Axis Piezo Scanner to 200 x 200 x 10µm High-Dynamics & 66x66mm Aperture for Scanning Microscopes

100x100µm Standard Scanning / Positioning Range
Direct Drive, High-Speed Versions for Particle Tracking
Capacitive Sensors provide Resolution to 0.1 Nanometers
Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
Frictionless, EDM cut Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Vacuum and Non-Magnetic Versions

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To 200µm Scanning / Positioning Ranges
Sub-Nanometer Resolution
Frictionless, High-Precision Flexure Guiding System
Capacitive Sensors for Highest Linearity
Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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PInano XY Piezo Scanning Stage for SR Microscopy, 200x200µm Large Aperture for Slides and Petri Dishes		PIMars™ XYZ Piezo Nanopositioning System, to 340 µm High-Precision Stage, 3 to 6 Axes, 66x66 mm Aperture

200x200µm Scanning / Positioning Range
Direct-Drive Version for Higher Dynamics
Choice of Sensors: PiezoResistive (Lower Cost) or Capacitive (Higher Performance)
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Economical System with High Performance Controller

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To 340µm XYZ Scanning / Positioning Ranges
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
Excellent Scanning Flatness with Flexure Guiding System
High-Dynamics Version Available; 6-Axis Version Available
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
UHV Versions to 10^-9 hPa

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P-541, P-542 Ultra-Low Profile XY Piezo-Nanopositioning Stage, 100x100µm, 200x200µm Lowest Profile XY Nanopositioning System with 80x80mm Aperture with Parallel Metrology		P-915K XY & Theta-Z Piezo Nanopositioning Stage , 250x250µm, 16mrad, 3 Degrees of Freedom in the XY Plane

100x100µm & 200x200µm Scanning / Positioning Range
Direct-Drive Option for Higher Dynamics, Tracking Applications
Ultra-Low Profile: 16.5 mm; Large Clear Aperture 80x80mm
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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250x250µm, 16 mrad Scanning / Positioning Ranges
Frictionless, High-Precision Flexure Guiding System
High Stiffness >1 N/µm
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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P-611 XY & XZ Piezo Nanopositioner Compact & Cost Effective 2-Axis Piezo System		P-615 NanoCube® XYZ Piezo System, Long-Travel Multi-Axis Piezo Stage for Precision Alignment Applications

Cost-Effective Piezo Mechanics & Controller System Solution
Strain Gauge Sensor Versions & Open Loop Versions
120x120 µm Scanning / Positioning Range
Small Footprint 44x44 mm
Frictionless, EDM Cut Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
XYZ, X & Z Systems Available

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Up to 420x420x300µm XYZ Scanning / Positioning Ranges
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
10 mm Aperture, for Alignment and Photonics Packaging Applications
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Open- & Closed-Loop Options
Vacuum Versions to 10^-9 hPa
Frictionless, High-Precision Flexure Guiding System
1 nm Resolution

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PIHera® Compact XY Piezo Nanopositioning Stages Cost Efficient & High-Accuracy		PIMars™ 6-Axis Piezo Nanopositioning System, 200µm, 1 mrad

50 to 1800 µm Scanning / Positioning Ranges
High-Precision, Cost-Efficient
Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
Frictionless, High-Precision Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
X-, XY-, Z- and XYZ-Versions
Vacuum Option

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6 Degrees of Freedom
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Sensors provide High Linearity and Resolution with 0.02% Positioning Accuracy
Excellent Scanning Flatness with Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
UHV Versions to 10^-9 hPa

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P-517, P-527 Multi-Axis Piezo Scanner to 200x200µm + Rot-Z High-Dynamics & 66x66mm Aperture for Scanning Microscopes		P-587 6-Axis Piezo Nanopositioning Stage, to 800µm

To 200µm Scanning / Positioning Ranges
Sub-Nanometer Resolution
Frictionless, High-Precision Flexure Guiding System
Capacitive Sensors for Highest Linearity
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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For Surface Metrology, Scanning and Positioning in all Six Degrees of Freedom
800x800x200 µm Linear, up to 10 mrad Rotational Range
Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
Capacitive Sensors provide High Linearity and Resolution
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
Frictionless, High-Precision Flexure Guiding System
Active Trajectory Control in All 6 Degrees of Freedom

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P-915K XY & Theta-Z Piezo Nanopositioning Stage , 250x250µm, 16mrad, 3 Degrees of Freedom in the XY Plane		N-515K Non-Magnetic High-Load Piezo Hexapod, 6-Axis Precision Positioning System with PiezoWalk Linear Drives

250x250 µm, 16 mrad Scanning / Positioning Ranges
Frictionless, High-Precision Flexure Guiding System
High Stiffness >1 N/µm
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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Non-Magnetic Design
PiezoWalk Drives: Self Locking at Rest, No Heat Generation
10 mm Linear Motion, 6° Rotation
50 kg Load
Nanometer Resolution
202 mm Aperture and low-Profile: 140 mm
Parallel Kinematics for Enhanced Dynamics

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P-628K Long-Travel XY Piezo Nanopositioning Stage with Nanometer Flatness, 800x800µm Novel Active Z-Axis Design Provides Real Time Runout Compensation

Closed-Loop Scanning / Positioning Range 800x800µm (up to 1500µm Possible)
Improved Straightness of Travel < 1nm
High-Precision, Cost-Efficient
Resolution to 0.1 nm, 0.02% Positioning Accuracy
Frictionless, High-Precision Flexure Guiding System
PICMA® Long Life Ceramic Encapsulated Piezo Actuators

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PIHera® Long Travel XY Piezo Nanopositioning Stage, to 1800x1800µm Cost Efficient High-Accuracy, Nanopositioner Family Long Travel Ranges

To 1800 µm Scanning / Positioning Range
High-Precision, Cost-Efficient
Capacitive Sensors provide High Linearity and Resolution
Frictionless, High-Precision Flexure Guiding System
0.02% Positioning Accuracy
PICMA® Long Life Ceramic Encapsulated Piezo Actuators
X-, XY-, Z- and XYZ-Versions
Vacuum Option

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