Linear Nanopositioning Stage Overview

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These linear nanopositioning stages provide resolution down to and below 1 nanometer. Several types are available: flexure guided stages for applications that require the highest guiding precision and fastest response, piezo-motor driven stages for longer travel ranges and hybrid stages that combine the advantages of conventional long-travel positioning systems with the precision of piezo-flexure mechanisms. Air bearings, like flexure guides, also provide friction-free, zero-wear motion, but with much larger travel ranges. PI offers a line of air bearing linear slides for precision nanometer precise positioning and scanning applications.

Air Bearing XY Tables are also available from PI.





A-142 Compact Air Bearing Linear Nanopositioning Slide with Linear Motor


  • Ideal for Alignment, Imaging and Scanning
  • Zero Wear, High Dynamics
  • 10mm Travel
  • 5 nm Sensor Resolution
  • XY and XYZ Combinations
  • Zero Maintenance, No Particle Generation, Ideal for Clean Room
  • More comapct Air Bearing Nanopositioning Slides

The A-142 air bearing linear slide provides a compact nanopositioning solution for linear precision motion, in semiconductor, medical, photonics and imaging and scanning applications. Despite the compact dimensions, 10mm travel is available, and XY and XYZ liner stage combinations are also available. The integrated voice coil linear motor provides 2G acceleration and up to 450mm/sec velocity.

Air Bearing Linear Nanopositioning Slide Datasheet, Drawings, Order Info
A-142 Air Bearing Slide




Video: A 3-Axis Linear Stage Version of the A-142 Air Bearing Linear Slide, ideal for fast Multi-Axis Scanning and Alignment. https://www.youtube.com/watch?v=r_GDznV36-0







Low-Cost Mini Nanopositioning Stage, up to 25 mm Travel, 1 nm Resolution

Mini Nanopositioner
  • Stick Slip Piezo Drive
  • Travel from 6 mm to 25 mm
  • Open and Closed Loop Designs
  • Rotation Stages also Available

The Q-522 series mini piezo stages provide long travel ranges at a very low prics. They are based on a stick-slip piezoelectric motor drive and can be operated in both open and closed-loop with linear encoders providing 1 nanometer resolution.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info




Q-545 Compact Piezo Motorized Nanopositioning Stage : 25mm Travel


Piezo Stage This PIShift piezo motor-driven, nanopositioning stage combines long travel and high resolution.

  • Up to 25 mm Travel
  • PIShift Piezo Motor: Self-Locking at Rest, no Heat Generation, no Servo Dither
  • Compact Footprint and Low Profile
  • High Resolution Linear Encoder (2 nanometer)


Linear Nanopositioning Stage Datasheet, Drawings, Order Info




N-565 Piezo-Motor-Driven Stage, 13-52mm Travel


This low profile nanopositioning stage is driven by a self-clamping Piezo-Walk type linear motor. An interferometric encoder provides sub-nanometer resolution.

  • Interferometric Encoder: 0.5 Nanometer Resolution
  • Self Clamping at Rest: Extra High Positional Stability, No Heat Generation and Servo Jitter
  • Travel range 13, 26 and 52mm
  • Very Low Profile
  • Excellent guiding accuracy
  • Max. velocity 10 mm/second


Linear Nanopositioning Stage Datasheet, Drawings, Order Info
Positioning  High-Resolution Translation Stage




High-Precision Linear Motor Stages: 50 to 230mm, 1 Nanometer Resolution


Hybrid  Stage

Read Article / Measurements | Linear Nanopositioning Stage Datasheet, Drawings, Order Info
The V-551 Linear Motor Nanopositioning Stage family integrates non-contact motors and non-contact absolute measuring encoders.

  • Ironless non-cogging direct drive motor
  • V-max: 500 mm/sec
  • Reliable Execution of Nanometer Size Increments
  • Fast Settling Time to Nanometer Precision
  • Ultra-High Precision Absolute Encoder, 2nm Resolution
  • Sub-Nanometer Encoder Option
  • Frictionless Motor Drive and Optical Encoder
  • Excellent Velocity Control




Video: Vertical Linear Nanopositioning Stages with Piezo and Voice Coil Motors for Fast Focussing, Microscopy, Surface Metrology, Semiconductor Test, etc.







PIHera Piezo Flexure-Guided Nanopositioning Stage Family: 50Ám to 1.8mm


PIHera piezo linear positioning systems feature travel ranges from 50 microns to 1.8mm. Despite the long travel the units are compact and provide rapid response and high guiding precision.

  • Positioning Ranges 50 to 1800 microns
  • High-Precision, yet Cost-Efficient
  • To 0.1 Nanometer Resolution
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Frictionless, High-Precision Flexure Guiding System
  • Outstanding Lifetime Due to PICMA Piezo Actuators
  • X-, XY-, Z-, XYZ Versions
  • Vacuum Versions Available

Piezo Positioning  Family

Linear Nanopositioning Stage Datasheet, Drawings, Order Info




P-753 LISA Linear Piezo Stage & Piezo Actuator, to 38Ám, High-Dynamics, High Stability


Positioning  Stage & Piezo Actuator
  • Resolution 0.05 Nanometers, Rapid Response
  • Versatile Design: Both Flexure Stage and Guided Actuator
  • Direct Metrology Capacitance Feedback for Highest Linearity & Long term Stability
  • Frictionless Precision Flexure System, for Ultra-Straight Motion
  • Long Life PICMA Piezo Actuators
  • Vacuum and Nonmagnetic Versions Available

P-753 LISA Linear Stage / Actuators are high-speed piezo nanopositioners to work as both stage and guided actuator. Capacitive feedback provides the highest precision and stability.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info




P-752 High Precision Nanopositioning Flexure Stage, to 35Ám


  • 0.1 nanometer Resolution, Millisecond Response
  • Travel to 35 microns
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Ultra-Straight Motion with Flexure Guidance
  • Long Life PICMA Piezo Actuators

P-752 piezo flexure nanopositioning systems provide rapid response with fast settling and extreme straightness and flatness and extremely low tip/tilt errors. They can be used horizontally and as Z-positioners. These stages perform especially well in Scanning Probe Microscopy and for high-speed dithering and disk drive testing applications.
Piezo Positioning Flexure Stage

Linear Nanopositioning Stage Datasheet, Drawings, Order Info




P-750 High-Load Piezo-Nanopositioning Stage, Direct Metrology, 10kg Load, 75Ám


High Load Stage
  • 10 kg Load Capacity
  • 1 nanometer Lateral Guiding Precision
  • Resolution < 1 nanometer
  • Long Life PICMA Piezo Actuators
  • Fast Response
  • 75 microns Positioning Range
  • Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
  • Frictionless Precision Flexure Guiding System


Linear Nanopositioning Stage Datasheet, Drawings, Order Info




PiezoMove Low-Cost Flexure Actuator Family, for OEMs


  • 3 Designs, Many different Models
  • Positioning Ranges to 1 mm (1,000 microns)
  • Nanometer Resolution, Closed-Loop Available
  • Frictionless, High-Precision Flexure Guiding System
  • High Dynamics and Stiffness
  • Long Life PICMA Piezo Actuators
  • Custom Designs: Non-Magnetic / Larger Travel or Faster Response
  • For Adaptronics, Optics, Medical, Biotech and Microfluidics Applications

These flexure piezo system actuators are lever-amplified and provide large positioning ranges to 1000 microns, fast response and high positioning accuracy in a small package.
Actuators Flexure Family

Linear Nanopositioning Stage Datasheet, Drawings, Order Info




P-611.1 Cost-Effective Nanopositioning Stage

Linear Stage

Linear Nanopositioning Stage Datasheet, Drawings, Order Info
  • Cost Effective Design with Strain Sensors
  • Small Footprint 44x44 mm
  • Positioning Range to 120 microns
  • Resolution to 0.2 Nanometers
  • Cost-Effective Contrllers available
  • Long Life PICMA Piezo Actuators
  • Also: XY, XZ, XYZ & Z Stages

P-611.1 piezo flexure nanopositioning stages are cost effective positioners with strain gauge feedback. 1 to 3 axis configurations are available. The systems provide up to 120 microns travel with sub-nanometer resolution.




PIFOC Fast Objective Focusing Piezo Nanopositioning Vertical Stage


  • Compact, Light-Weight, Long Positioning Ranges to 800Ám
  • Ideal for Fast Autofocus Applications
  • Clear Aperture up to 29 mm
  • High Performance Position Feedback Sensors: Capacitive Direct Measuring
  • Sub-Nanometer Resolution


PDF Brochure | Linear Nanopositioning Stage Datasheet, Drawings, Order Info
Nanofocusing




S-303 Nanopositioning High-Dynamics High-Resolution Piezo Phase Shifters


Phase Shifter

PDF Brochure | Linear Nanopositioning Stage Datasheet, Drawings, Order Info
  • 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • < 0.1 Nanometer Resolution; 3 Microns Positioning Range
  • Direct Metrology Option: Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Exceptional Thermal Stability
  • Aperture with Open-Loop Versions
  • Compact Size: 30 mm Diameter x 10 mm

S-303 phase shifters are very fast piezo systems based on tripod drive. They provide 3Ám positiong range with angstrom size step resolution, and sub-msec response dynamics. The S-303 can be mounted in any orientation. Open- and closed-loop versions are available.


nano

Engineered Nanopositioning Systems:
Key to Nanometer Sized Features





Watch Engineered Nanopositioning Solutions Video

Nano Positioning Stages:





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