What are Nanopositioning Motors Used For
Nanopositioning motors are used for extremely precise motion in microscopy, semiconductor manufacturing, photonics alignment, microassembly, metrology, medical devices, and optical systems. They provide nanometer and sub-nanometer positioning over short or long travel ranges, enabling accurate movement of samples, probes, optics, sensors, actuators, and miniature mechanical components.
Piezo nanopositioning motors and actuators use different drive principles depending on force, travel, speed and resolution requirements. PiezoWalk motors provide long travel, high force and nanometer resolution. Inertia-type motors are compact and cost-effective. Flexure-guided amplified actuators provide shorter travel ranges with very high resolution for scanning and precision motion. Ultrasonic piezo motors provide high speed and are typically used where fast motion is more important than sub-nanometer positioning precision.
PiezoWalk Linear Nanopositioning Motors / Actuators
High Force V8-PiezoWalk Nanopositioning Motor Actuator, Piezo Stepper
- 55 mm travel, 55 N force
- Robust V8 PiezoWalk drive for micro- and nano-manipulation
- Very high acceleration, suitable for cell penetration
- Continuous stepping mode for long travel and analog mode for picometer-level motion
- Self-locking at rest, with no heat generation
- Smooth motion without closed-loop jitter
- Vacuum-compatible and non-magnetic versions available
N-310 OEM Miniature Linear Piezo Motor / Actuator
- PiezoWalk® linear motor
- Standard travel ranges from 20 to 125 mm
- Compact design and low operating voltage
- 0.03 nm resolution
- Push / pull force to 10 N
- Self-locking at rest for nanometer stability
- Non-magnetic and vacuum-compatible working principle
N-111 Closed-Loop PiezoWalk® Nanopositioning Linear Motor Actuator for OEMs
- Patented PiezoWalk® drive principle
- Resolution to 0.025 nm
- Closed-loop option
- 10 mm travel
- 70 N holding force
- Self-locking at rest, with no heat generation
- Non-magnetic, vacuum-compatible and cleanroom-compatible
N-216 Closed-Loop PiezoWalk® High-Force Nanopositioning Motor Linear Actuator
- Patented PiezoWalk drive principle
- Closed-loop option
- Cleanroom compatible
- 20 mm travel range
- Resolution to 0.03 nm
- Holding force to 800 N
- Self-locking at rest
- Non-magnetic and vacuum-compatible working principle
Flexure-Guided Linear Nanopositioning Actuators
P-601 Closed-Loop Piezo Flexure Nanopositioning Actuator, to 400 µm
- Travel ranges to 400 µm
- Zero-friction flexure guidance for ultra-straight motion
- Resolution to 0.2 nm
- High dynamics and stiffness
- Custom longer-travel, faster-response and non-magnetic designs feasible
- Long-life PICMA® ceramic-encapsulated piezo actuators
- Open-loop and closed-loop models
P-603 Closed-Loop Low-Cost Piezo Flexure Nanopositioning Actuator
- Cost-efficient flexure actuator design
- Travel to 500 µm
- Zero-backlash flexure guidance
- Long-life PICMA® ceramic-encapsulated piezo actuators
- Open-loop and closed-loop models
- Custom longer-travel, faster-response and non-magnetic designs feasible
Piezo-Motor Micrometers
- Up to 13mm travel
- Nanometer resolution
- Open and closed-loop versions
Preloaded Piezo Stack Actuators
P-845 Preloaded Piezo Actuators for High Loads and Force Generation
- Outstanding lifetime due to PICMA® piezo ceramic stacks
- Travel range to 90 µm
- Forces to 3000 N pushing and 700 N tensile
- Sub-millisecond response and sub-nanometer resolution
- Vacuum and water-resistant case options
- Closed-loop option
P-841 Preloaded Piezo Stack Actuators, Closed-Loop Option
- Long-life PICMA® ceramic-encapsulated piezo actuators in a compact case
- Forces to 1000 N pushing and 50 N tensile
- Sub-millisecond response
- Sub-nanometer resolution
- Ball-tip and vacuum options
Linear Piezo Stack Actuators
P-882 · P-888 PICMA® Multilayer Ceramic-Encapsulated Piezo Stack Actuators
- Microsecond response and high stiffness
- Sub-nanometer resolution
- Large operating temperature range and high humidity resistance
- Excellent temperature stability
- Peak current up to 20 A for dynamic operation
- UHV compatible to 10-9 hPa
- Superior lifetime under demanding conditions
PICA™ Power High-Force Piezo Stack Actuators
- Operating temperature to 150 °C
- High load capacity to 80,000 N
- Sub-nanometer resolution
- Extreme reliability beyond 109 cycles
- Microsecond response
- Options include UHV to 10-9 hPa, non-magnetic versions and PT1000 temperature sensor
PICA™ Thru Piezo Stack Actuator with Aperture
- Very robust design and extreme reliability beyond 109 cycles
- Cross sections to 56 mm diameter
- Clear aperture
- Sub-millisecond response and sub-nanometer resolution
- Vacuum options and a variety of shapes available
