Nanopositioning Stages & Engineered Systems by PI
Piezo flexure stages, air bearing stages, linear motor systems, magnetic levitation platforms and motion controllers for applications where nanometer-level positioning is critical.
Nanopositioning equipment and instrumentation plays a crucial role in microscopy, semiconductor test and manufacturing, optical alignment, bio-nanotechnology, optical scanning, photonics packaging and high-stability precision positioning.
PI provides a wide range of nanopositioning systems to suit different performance requirements. Options include piezo flexure mechanisms, high-performance linear motor stages, air bearing systems, magnetic levitation platforms and several piezo motor technologies.
Why Piezo Flexure Stages?
Piezo flexure positioners combine fast response, sub-nanometer resolution and very precise motion guidance. Because the motion is based on elastic deformation rather than rolling or sliding contact, these systems are frictionless, wear-free and well suited for 24/7 operation, vacuum environments and high-stability scanning.
Beyond Piezo: Air Bearings & Linear Motors
For longer travel or larger payloads, PI also provides air bearing-based nanopositioning systems and direct-drive linear motor stages. These systems eliminate mechanical contact and help reduce friction, wear, rumble and geometric error.
Piezo Motion & Engineered Nanopositioning Systems
Nanometer-sized features require motion systems that combine mechanical precision, sensor feedback, servo control and stable system integration. PI designs the mechanics, digital controllers, sensors, software interfaces and custom engineered subsystems needed for demanding research and industrial automation tasks.
Video: Engineered nanopositioning solutions for advanced precision motion applications.
Frictionless Motion for High Precision Applications
The piezo effect enables extremely uniform, controlled small displacements. PI piezo nanopositioning stages are flexure-guided, maintenance-free, lubricant-free and available in vacuum and ultra-high vacuum configurations. Advanced digital servo controllers and high-resolution position sensors provide closed-loop control with sub-nanometer position resolution. The combination of mechanics, sensor technology and control electronics along with a wealth of software drivers and virtual instruments makes our nanopositioning systems unique.
Video: Compact XYZ nanopositioning stage based on air bearings and linear motors.
Nanopositioning Product Categories
Optical Microscopy Piezo Stages, Z-Stages & Objective Nanofocusing Systems
PInano XYZ & XY piezo positioning stages for super-resolution microscopy.
A-142 air bearing miniature nanopositioning stage with voice-coil linear motor.
High-speed piezo-Z slide scanner for low-profile, cost-effective super-resolution microscopy.
Z-piezo positioner for 3D imaging, with travel ranges to 500 µm.
Objective lens positioners and fast focusing systems in several travel ranges and objective diameters.
Piezo motorized XY microscope stage with scanner insert, 25 x 25 mm travel and low-profile design.
AFM, NSOM & E-Beam Scanning Piezo Stages
PicoCube piezo nanopositioning stage with picometer resolution and very compact 5 x 5 x 5 µm closed-loop travel.
PIMars precision positioning stage with travel to 300 x 300 x 300 µm and parallel metrology for high precision.
P-733 piezo positioning stage, available as non-magnetic and vacuum versions, with 100 x 100 µm travel and capacitive feedback.
Low-Profile Piezo Systems: XY, Z and Z/Tip/Tilt with Aperture
P-733.2DD and 3DD high-speed XY and XYZ precision positioning stages.
Low-cost, ultra-low-profile XY scanner for image dithering and sub-pixel stepping.
Linear Stages for Nano-Positioning
P-611, 100 µm entry-level piezo positioning stage with strain gauge feedback.
P-621.1 piezo positioning stages with high-accuracy capacitive sensors and 60 to 1800 µm travel ranges.
P-752 ultra-high precision piezo positioner.
Multi-Axis Piezo Positioning Stages and Z/Tip/Tilt Stages
Z and Z-tip/tilt piezo positioner with up to 200 µm travel, 4 mrad tilt, parallel kinematics and capacitive feedback.
PIMars piezo precision positioning stage with up to 300 x 300 x 300 µm travel and parallel metrology.
P-611 NanoCube compact XYZ NanoAlignment system with 100 x 100 x 100 µm travel and strain gauge feedback.
6-Axis Piezo Nanopositioning Stages
P-587 piezo positioning system with up to 800 µm / 10 mrad motion, parallel kinematics and parallel metrology.
Piezo hexapod with 6-axis motion, 10 mm linear travel, 6° rotation and 50 kg load capacity.
PIMars ultra-high accuracy positioner with 3- and 6-axis parallel kinematics and metrology.
Fast Steering Mirrors: Piezo Tip/Tilt Stages
S-334 tip/tilt stage and piezo steering mirror with up to 120 mrad deflection.
S-330 tip/tilt stage and piezo steering mirror with sub-millisecond responsiveness and up to 20 mrad deflection.
S-303 piezo phase shifter with very fast response and 25 kHz resonant frequency.
Flexure Actuators & Z-Piezo Positioning Stages without Aperture
Flexure-guided Z-actuator with motion to 480 µm, available in open-loop and closed-loop versions.
PIHera Z-stage family with motion to 400 µm, capacitive feedback and compact construction.
P-611, 100 µm low-cost piezo positioner with strain gauge feedback.
Long-Travel Piezo Positioners
NanoCube alignment stages are available with travel to 500µm and 6 axes, for optical alignment and related tasks.
PIHera XY-stage positioners with motion to 1800 µm, capacitive feedback and compact construction.
Air bearing stages and hybrid actuators & stages provide long travel with nanometer precision.
Piezo Motors and Linear Actuators
Compact OEM piezo stepping motor / actuator with sub-nanometer precision.
High-force piezo stepping motor / actuator with sub-nanometer precision.
High-speed piezo motor / actuator.
Custom Piezo Positioning Stages
Miniature stage for read/write head testing.
Lightweight, high-load stage design for faster response.
Fast tool servo piezo stage for non-circular turning of metal parts.
Controllers & Piezo Drivers for Precision Positioners
Custom 3-axis digital piezo controller card
Piezo motion controller for OEM integration.
Advanced modular digital controller for high-performance piezo positioners.
Need a Custom Nanopositioning System?
Contact PI engineering to discuss travel range, payload, sensor technology, controller architecture, environmental requirements and integration into your machine or experiment.
