2001 PI Piezo Stage & Nanopositioning Systems Specs

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P 772 Ultra-Compact Piezo Flexure Stage NanoPositioning / Scanning System

  • Ideal for Head/Media Test & Fiber Optics
  • Smallest Flexure-Guided Stage with Capacitance Feedback
  • Resolution < 0.1 nm
  • Ultra-Fast Response (1.7 kHz Resonant Frequency)
  • ID Chip for AutoCalibrate Function

    P 772 Piezo Flexure Stages are the smallest flexure-guided Piezo Stage Nanopositioning System with integrated capacitance feedback currently available on the market. They provide a position-ing and scanning range of up to 10 µm, sub-nanometer resolution and ultra-fast response. P 772 stages are designed for applications with loads up to 100 grams. For optimized operation and interchangeability of the nanomechanism and controller, model P 772.1CD is equipped with an ID chip which holds all calibration data and sends it to the digital controller (e.g. E 750.CP) when powered up. Model P 772.1CL can be used with analog and digital controllers.

    Applications: Head/media test, disk drive test, fiber optics metrology, nanopositioning, scanning microscopy, scanning interfer-ometry, biotechnology, micromanipulation etc.

    Operating principle:

    P 772 are equipped with a multilayer piezo stack integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated capacitance position feedback sensor provides sub-nanometer-scale resolution and stability in closed-loop operation (with PI closed-loop electronics).

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    P 780 Miniature Piezo Flexure Piezo Stage Nanopositioning System & Scanner

  • Extremely Compact
  • 80 µm Range
  • Resolution < 10 nm
  • Fast Response (1 kHz Resonant Frequency)

    P 780 Piezo Flexure Stages are extremely compact and fast devices, providing a positioning and scanning range of up to 80 µm with settling time of only a few milliseconds. The P 780 is designed for applications with loads up to 100 g. Both open-loop and closed-loop versions with integrated LVDT (linear variable differential transformer) feedback sensors are offered to suit your application.

    Applications: Metrology, nanopositioning, scanning microscopy, disk drive testing, fiber optics, scanning interferometry, biotechnology, micromanipulation etc.

    Operating principle:

    The P 780 is equipped with a multilayer piezo stack integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high resolution and exceptional guiding precision. An integrated LVDT position feedback sensor provides nanometer-scale resolution and stability in closed-loop operation (with PI electronics as recommended below).

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    P 752.11C P 752.21C Miniature Piezo Flexure Piezo Stage Nanopositioning System & Scanner

  • Ideal for Disk Drive Testing
  • Writing Fiber Bragg Gratings
  • Ultra-fast Response
  • Ultra-Precise Trajectory Control
  • Digital Controllers with fast Fiber Interface Available
  • Feedforward Techniques for Elimination of Self-Generated Resonances Available
  • 0.1 nm Resolution

    The P 752 Piezo Flexure Stages are extremely compact and fast devices, providing a positioning and scanning range up to 30 micrometer with very fast settling time and extremely low rotational error. P 752 stages were specially designed for disk drive testing applications, with loads of a few 100 grams. They are equipped with capacitance feedback sensors providing sub-nanometer resolution and stability.

    Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system throughput and stability. In combination with the E 612 controller the 15 micrometer stage (with a 300 g load) settles to better than 0.1% in 17 msec, significantly faster than conventional systems.

    Applications: Disk drive testing, writing fiber Bragg gratings, metrology, nanopositioning, scanning microscopy, fiber optics, scanning interferometry, biotechnology, micromanipulation etc.

    Operating principle:

    P 752 stages are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high-re-solution and exceptional guiding precision. An integrated capacitance position feedback sensor provides sub-nanometer resolution and stability in closed-loop operation (with PI electronics).

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    P 753 LISA Linear Piezo Stage / Piezo Actuator

  • Unique Design: Both Stage and Actuator
  • Ultra-compact
  • Precision Trajectory Control
  • 0.05 nm Resolution
  • Ultra-fast Response

    The P 753 LISA Linear Piezo Stage / Piezo Actuator is an extremely compact and fast device, providing a positioning and scanning range up to 38 micrometer with very fast settling time and extremely low rotational error. P 753 stages combine the small dimensions of a piezo stack actuator with the precise trajectory control of a flexure-guide slide. They can be used both as linear actuators and as linear slides with extremely precise guiding systems. They are equipped with capacitance feedback sensors providing sub-nanometer precision and stability. Careful attention to mass minimization results in significant reduction in inertial recoil forces applied to the supporting structures, enhancing overall system throughput and stability.

    Applications: Disk drive testing, writing fiber Bragg gratings, metrology, nanopositioning, scanning microscopy, fiber optics, scanning interferometry, biotechnology, micromanipulation etc.

    Operating principle:

    P 753 stages are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. An integrated capacitance position feedback sensor provides sub-nanometer precision and stability in closed-loop operation (with PI electronics).

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    P 750 Piezo Flexure Piezo Stage Nanopositioning System & Scanner

  • 1 nm Lateral Guiding Precision
  • precision < 1 nm
  • Fast Response
  • 75 micrometer Range
  • 10 kg Load Capacity

    P 750 Piezo Flexure Piezo Stage Nanopositioning System are designed to provide motion in one axis with extremely low off-axis error. They provide a positioning and scanning range up to 75 micrometer with settling time of a few milliseconds. Closed-loop versions with integrated capacitance and LVDT (linear variable differential transformer) feedback sensors are offered for enhanced accuracy and repeatability.

    Applications: Metrology, disk drive testing, wafer steppers, semiconductor equipment.

    Operating principle:

    P 750 is equipped with a multilayer piezo stack integrated into a computer optimized flexure guiding system. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated position feedback sensors (LVDT or capacitive) provide subnanometer precision and stability in closed-loop operation (with PI electron-ics, as recommended below).

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    P 287 Vertical / Tilt Piezo Flexure Stage / Flexure Actuator

  • Vertical Travel to 700 micrometer
  • Tilt to 0.7 degrees
  • Non-Magnetic Stainless Steel Design

    The P 287 is a high-precision, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 micrometer at the tip. A ball seat is machined into the tip to decouple any rotation if the P 287 is used as a linear drive. In that case an external guiding system is recommended (e.g. frictionless diaphragm spring).

    Applications: Wafer inspection, nanopositioning, medical analysis, biology, optics.

    Operating principle:

    P 287 positioners are equipped with high-voltage piezoelectric drives (0 to 1000 V) integrated into a zero stic-tion/friction, ultra-high-precision precision wire electric discharge machining cut flexure motion-amplifier system. The linear motion of the piezo translator produces an arc motion of the tip. Low-voltage versions of P 287 are available on request. Optional P 703.20 high-vacuum modification, see page Fehler! Textmarke nicht definiert., "PZT Actuators" section P 705.00 positive polarity, see page 1.35, "PZT Actuators" section

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    P 290.00 Long-Range Piezo Flexure Slide / Z-Stage / Flexure Actuator

  • Displacement to 1000 micrometer
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design P 290 is a unique, piezoelectrically driven stage providing a 1000 micrometer stroke. It is designed for high-precision static and low-frequency dynamic positioning applications.

    Applications: Wafer inspection, nanopositioning, medical analysis, biology, optics.

    Operating principle:

    The P 290 is a vertical positioning stage driven by a piezoelectric drive system. The piezo system consists of two stacked PZT flexure levers machined from one solid piece of stainless steel. Each of the two positioners is equipped with a high-voltage piezoelectric stack actuator (0 to 1000 V) integrated into a zero stiction/friction precision wire electric discharge machining cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt. Optional P 705.00 positive polarity, "PZT Actua-tors" section.

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    P 281 P 282 XY and XYZ PZT Flexure Piezo Stage Nanopositioning Actuators

  • Cost Effective XZ (XY) & XYZ Positioning
  • Travel Ranges to 100 x 100 x 100 micrometer P 281.xx and P 282.xx two-axis and three-axis PZT flexure stages are based on combinations of P 280.xx stages (see Fig. 2.22/1). P 281.xx and P 282.xx multi-axis stages are available in three different sizes with travel ranges of 30, 50 and 100 micrometer. P 282 XYZ stages are easily assembled by bolting the bottom stage (X) down first and attaching the second (Y) and thrid (Z) stages successively. P 281 stages can be mounted as XZ (Fig. 2.15/10) and XY combinations.

    Optional

    P 705.00 positive polarity, "PZT Actuators" section.

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    P 611 NanoCube (r) XYZ Piezo NanoPositioning Actuator System

  • Ideal for Fiber-Alignment and Photonic Packaging Applications
  • 100 x 100 x 100 micrometer Travel Range
  • 1 nm precision
  • Closed and Open-Loop Versions
  • Precision Trajectory Control
  • Small Package: 44 x 44 x 44 mm (Closed-Loop Version!)
  • Fast Scanning and Settling
  • Large Variety of Controllers The P 611 NanoCubeTM is PI's smallest multi-axis Piezo-NanoPositioning System. Its 100 x 100 x 100 micrometer XYZ positioning and scanning range comes in an extremely compact package of only 44 x 44 x 44 mm (models P 611.3O and P 611.3F). Equipped with a zero stic-tion/friction guiding system, the NanoCubeTM provides motion with ultra-high precision and settling times of only a few milliseconds. Four versions (open- and closed-loop) are offered to suit your application. The P 611.3SF and P 611.3OF models provide a mechanical interface for several fiber, waveguide and optics adapters available from PI (e.g. model F 603.60).

    Applications: Photonic Automation and Packaging, Optical Device Testing, MEMS Positioning/Alignment, Fiber Alignment, Micromachining, Micro-Manipulation (Life Sciences), Semiconductor Test Systems NanoCubesTM can be easily combined with a variety of automated or manual PI micropositioning systems, from single axis stages to 6-degree-of-freedom micromanipulators.

    Operating principle:

    P 611 Piezo Stage Nanopositioning System are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled (Finite Element Analysis) for zero stiction and friction, ultra-high precision and exceptional guiding precision. Integrated strain gage position feedback sensors provide nanometer-scale precision and stability in closed-loop operation (with PI control electronics).

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    P 733 Single-Module High-Dynamics XY Piezo System Flexure Stage NanoPositioner and Scanner

  • Precision Trajectory Control
  • Single-Module, Parallel-Kinematics Design Finite Element Analysis tures Enhanced Responsiveness and Automatic Runout-Compensation
  • For XY Scanning & Positioning
  • 100 x 100 micrometer Travel Range
  • Integrated Capacitance Sensors for precision < 1 nm
  • 50 x 50 mm Clear Aperture P 733 NanoPositioning Stages are fast and highly accurate, low-profile, XY scanning and positioning systems. They provide a positioning and scanning range of 100 x 100 micrometer and are equipped with capacitance feedback sensors for highest accuracy and repeatability, in the nanometer and sub-nanometer range. The 50 x 50 mm clear aperture is ideal for transmitted-light applications such as near-field scanning microscopy, scanning microscopy, confocal microscopy and mask alignment. P 733 stages are designed for applications with loads up to 2 kg.

    Applications: Scanning microscopy, semiconductor metrology, lithography, mask repair and other test equipment, precision mask and wafer alignment, scanning interferometry, image resolution enhancement surface metrology / structure analysis, biotechnology, micromanipulation and other applications where single plane, high-precision XY motion is required.

    Operating principle:

    P 733 Piezo Stage Nanopositioning System are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated capacitance position feedback sensors provide sub-nanometer precision and stability in closed-loop operation (with PI electronics).

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    P 734 Single-Module High-Dynamics XY Piezo Flexure Piezo Stage Nanopositioning System & Scanner

  • Single-Module, Parallel-Kinematics Design Finite Element Analysis tures Enhanced Responsiveness and Automatic Runout-Compensation
  • Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
  • Flatness in the Low-Nanometer Range
  • 100 x 100 micrometer Travel Range
  • Integrated Capacitance Sensors for precision < 1 nm
  • 50 x 50 mm Clear Aperture P 734 NanoPositioning Stages are fast and highly accurate, low-profile, XY scanning and positioning systems. They provide a positioning and scanning range of 100 x 100 micrometer and are equipped with capacitance feedback sensors for highest accuracy and repeatability in the nanometer and sub-nanometer range. The P 734 Finite Element Analysis tures an ultra-precise flexure guiding system, confining motion to the XY plane and reducing runout in Z to a few nanometers. This unsurpassed trajectory precision is fundamental for precise surface inspection and scanning microscopy measurements. The 50 x 50 mm clear aperture is ideal for transmitted-light applications such as near-field scanning microscopy, scanning microscopy, confocal microscopy or mask alignment. P 734 stages are designed for applications with loads up to 2 kg.

    Applications: Scanning microscopy, metrology, surface metrology / structure analysis, semiconductor metrology, lithography, mask repair and other test equipment, precision mask and wafer alignment, scanning interferometry, image resolution enhancement, biotechnology, micromanipulation and other applications where single-plane, high-precision XY motion is required.

    Operating principle:

    P 734 Piezo Stage Nanopositioning System are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated capacitance position feedback sensors provide sub-nanometer precision and stability in closed-loop operation (with PI electronics).

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    P 500 Multi-Axis Single-ModulePiezo Flexure Piezo Stage Nanopositioning System & Scanner

  • Precision Trajectory Control
  • Single-Module, Parallel-Kinematics Design Finite Element Analysis tures Enhanced Responsiveness and Automatic Runout-Compensation
  • 1- to 6-Axis Versions
  • Travel Ranges to 200 m
  • Clear Aperture to 66 x 66 mm
  • Integrated Capacitance Displacement Sensors
  • Optional Active Error Compensation for Enhanced Trajectory Control P 500 family linear slides are low-profile, high-precision, piezoelectrically driven, multi-axis Flexure Stages providing motion with up to 6 degrees of freedom. Linear travel ranges to 200 x 200 x 20 micrometer and rotation ranges to ± 2 mrad are available. The 66 x 66 mm clear aperture is ideal for transmitted-light applications. The low cost and versatility of the P 500 stages are made possible by their unique Single-Module High-Dynamics multi-axis design.. State-of-the-art trajectory control is achieved in the P 527.6C. This stage incorporates 6-axis active error compensation to force sub-nm and sub-µrad straight-ness and flatness (ask for separate information).

    Applications: Metrology, lithog-raphy, nanoposi-tioning, scanning microscopy, disk-drive testing, optics, laser technology, micro-manufacturing

    Operating principle:

    Multilayer piezo stacks (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stic-tion/friction, ultra-high precision and exceptional guiding precision. Integrated capaci-tance position feedback sensors provide sub-nanometer resolu-tion and stability in closed-loop operation (with PI electronics). ORDERING INFORMATION:

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    P 762 Family of Piezo Flexure Piezo Stage Nanopositioning System & Scanner

  • 1, 2, 3 and 5 Axis Versions
  • Compact Design
  • 20 x 20 mm Clear Aperture
  • Travel 100 micrometer, Tilt to 3.4 mrad The P 762 Family of Piezo Flexure Stages are sensor-equipped multi-axis linear slides that come in the following versions: X, Z, XY, XYZ, Z X Y and XYZ X Y. All versions not containing a Z-Stage have a 20x20 mm clear aperture. The XY version consists of an X-Stage and a slightly modified Y module. The Z-stage is equipped with 3 PZT stacks located at the corners of a triangle. The stacks are individually matched for equal displacement and electrically connected in parallel. A displacement sensor, mounted in the center of the triangle, provides optimum stability at the expense of an aperture. The Z X Y-stage allows individual control of the three Z-direction pzt piezo stacks. The displacements are measured by three sensors. (See separate equation for tip and tilt calculation). The XYZ version consists of an XY-stage stacked together with a Z-stage. The XYZ X Y version consists of the XY-stage stacked together with a Z X Y-stage.

    Applications: Integrated optics, fiber alignment, semiconductor metrology, lithography, mask repair and other test equipment, scanning interferometry, disk drive testing, surface metrology / structure analysis, scanning microscopy, confocal microscopy, biotechnology, micromanipulation.

    Operating principle:

    P 762 linear slides are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated LVDT (linear variable differential transformer) position feedback sensors provide nanometer-scale precision and stability in closed-loop operation (with PI electronics).

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    P 770 Large-Aperture Single-Module High-Dynamics XY Piezo System Flexure Stage NanoPositioner and Scanner

  • Precision Trajectory Control
  • For XY Scanning and Positioning
  • 200 x 200 mm Clear Aperture
  • 200 x 200 micrometer Range
  • precision < 10 nm P 770 is a low-profile, highly accurate XY scanning and positioning system, providing a positioning and scanning range of 200 x 200 micrometer with better than 10 nm precision. The P 770 was spe-cially designed for semiconductor inspection systems. The 200 x 200 mm clear aperture is ideal for all transmitted-light applications, such as mask alignment.

    Applications: Metrology, nanopositioning, semiconductor metrology, lithography, mask repair and other test equipment, precision mask and wafer alignment, scanning interfer-ometry, surface metrology / structure analysis, etc.

    Operating principle:

    P 770 linear slides are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated LVDT (linear variable differential transformer) position feedback sensors provide high precision and stability in closed-loop operation (with PI electronics, as recommended below).

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    P 587 Long-Range, 6-Axis, Single-Module High-Dynamics Piezo System Flexure Stage NanoPositioner and Scanner

  • Precision Trajectory Control
  • For X Y Z X Y Z Scanning and Positioning
  • 800 x 800 x 200 micrometer Linear Range
  • 500 µrad Rotational Range
  • Capacitance Sensors for Ultra-High precision
  • ID Chip for AutoCalibrate Function P-587.6CD is a highly accurate 6-axes scanning and positioning piezo stage, providing linear travel to 800 micrometer and rotation ranges 1000 µrad. For optimized operation and interchangeability of the nanomechanism and controller, P-587.6CD is equipped with an ID chip which holds all calibration data and sends it to the digital controller when powered up.

    Applications: Metrology, nanopositioning, semiconductor metrology, lithography, mask repair and other test equipment, precision mask and wafer alignment, scanning interfer-ometry, surface metrology / structure analysis, etc.

    Operating principle:

    Multilayer piezo stacks (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high precision and exceptional guiding precision. Integrated capacitance position feedback sensors provide ultra-high precision and stability in closed-loop operation (with PI electronics).

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    P 720 P 721

    PIFOC Microscope Objective Piezo Stage Nanopositioning System & Scanner

  • Remotely Positions Objectives with Sub-nm Resolution
  • Travel to 100 m
  • Straightness of Travel 30 µrad
  • Fast Settling Time P 720/P 721 PIFOC Microscope Objective Piezo Stage Nanopositioning System are fast and compact drive units which can be mounted on most microscopes. The units are screwed between the turret and the objective, providing a positioning and scanning range of up to 100 micrometer with sub-nanometer resolution, while extending the optical path by only 13 mm (infinity-corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret). Standard thread is W 0.8x1/36", for alternate threads see ordering information. For larger positioning ranges see models P 722 & P 723 (page 3). In open-loop operation, the vertical position of the objective is roughly proportional to the drive voltage (see "Tutorial: Piezoelectrics in Positioning" section for behavior of open loop piezoelectric devices). The open-loop models, P 720 / P 721.00, are ideal for tracking applications where the position is controlled by data provided by an external sensor (e.g. optical displacement sensor, a CCD camera, etc.). The closed-loop versions allow absolute position control, high linearity and repeatability based on an integrated position feedback sensor.

    Applications: Scanning interfer-ometry, surface metrology / structure analysis, disk drive testing, autofocus sys-tems, scanning microscopy, confocal microscopy, bio- technology, semiconductor metrology, lithography, mask repair and other test equipment. Operating principle: PIFOC (r)positioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisti-cated flexure guiding system. The force exerted by the piezo drive pushes the flexure guiding system via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction, ultra-high resolu-tion and excep-tional guiding precision.

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    P 722 P 723 PIFOC (r) Microscope Objective Piezo Stage Nanopositioning System & Scanner

  • Remotely Positions Objectives with nm Resolution
  • Travel to 350 micrometer
  • Straightness of Travel 25 µrad
  • Settling Time 20 - 30 msec

    P 722/P 723 PIFOC (r) Microscope Objective Piezo Stage Nanopositioning System are fast and compact drive units which can be mounted on most microscopes. The units are screwed between the turret and the objective, providing a positioning and scanning range of up to 350 micrometer with nanometer resolution while extending the optical path by only 13 mm (infinity-corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret). Standard thread isW 0.8x1/36", for alternate threads see the ordering information. For smaller positioning ranges see models P 720 & P 721 (page 1). In open-loop operation, the vertical position of the objective is roughly proportional to the drive voltage (see "Tutorial: Piezoelectrics in Positioning" section for behavior of open loop piezoelectric devices). The open-loop models P 722.00 / P 723.00 are ideal for tracking applications where the position is controlled by data provided by an external sensor (e.g. optical displacement sensor, a CCD camera, etc.). The closed-loop versions allow for absolute position control, high linearity and repeatability based on an integrated position feedback sensor.

    Applications: Scanning interferometry, surface metrology / structure analysis, disk-drive testing, autofocus systems, scanning microscopy, confocal microscopy, biotechnology, semiconductor metrology, lithography, mask repair and other test equipment.

    Operating principle:

    PIFOC (r) z-positioners are equipped with multilayer piezo stack actuators integrated into a computer optimized flexure guiding system. The force exerted by the piezo drive pushes a flexure parallelo-gram via an integrated motion amplifier. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/ friction, ultra-high resolution and exceptional guiding precision.

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    P 280 PZT Flexure Piezo Stage Nanopositioning System & Scanner

  • Very Compact
  • Cost Effective
  • Displacement to 100 micrometer
  • XY and XYZ Combinations P 280.xx PZT Flexure Stages are compact and cost effective linear slides and Scanner. They are available in three different sizes, with displacements of 30, 50 and 100 micrometer. P 280 stages can be mounted in either a vertical or horizontal position, to easily adapt to specific mounting requirements.

    Applications: Nanopositioning, biomedical applications, patch clamping, fiber aligning, etc.

    Operating principle:

    P 280 linear slides are equipped with high-voltage piezoelectric contraction strip actuators integrated into the flexure guiding system. The force exerted by the piezo moves the flexure guiding system. The precision wire electric discharge machining cut flexures are Finite Element Analysis modeled for zero stiction/friction and ultra-high resolution. P 280 flexure stages can be combined to form XY and XYZ combinations (see page 1). Cable mounting positions can be specified (either A, B or C as shown in drawing 2.23/3) to suit your application. If not specified, the stages are delivered with cable position A. A spacer plate for ease of mounting is provided with the stages.